2010
DOI: 10.1016/j.apsusc.2009.10.017
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Structural properties and electrical characteristics of high-k Tm2Ti2O7 gate dielectrics

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Cited by 8 publications
(4 citation statements)
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“…2 shows the spectrum of O 1s for the 4.5 atom % Tm-doped TiO 2 sample annealed at 973 K in which a new contribution to the O 1s signal was observed at a BE of 530.8 eV. This signal is assigned to O 2− in the Tm 2 Ti 2 O 7 pyrochlore lattice [32]. Fig.…”
Section: Resultsmentioning
confidence: 99%
“…2 shows the spectrum of O 1s for the 4.5 atom % Tm-doped TiO 2 sample annealed at 973 K in which a new contribution to the O 1s signal was observed at a BE of 530.8 eV. This signal is assigned to O 2− in the Tm 2 Ti 2 O 7 pyrochlore lattice [32]. Fig.…”
Section: Resultsmentioning
confidence: 99%
“…In turn, the patterns obtained showed that anatase was the predominant phase in the samples annealed at 773 and 973 K in most cases, while rutile was the predominant phase in the samples annealed at 1173 K. So, the Tm 3+ ion may have been incorporated into the anatase structure but not the rutile one, probably because the ionic radius of Tm 3+ is considerably larger than that of Ti 4+ (r(Ti 4+ ) = 0.68 Å; r(Tm 3+ ) = 0.994 Å), 28 and the anatase structure is less dense than the rutile one. Moreover, Shlyakhtina et al reported fluorite-pyrochlore-fluorite phase transitions for Ln 2 Ti 2 O 7 (Ln = Lu, Yb, Tm), and that the pyrochlore structure is formed at T > 1073 K. 26 Typically, pyrochlore compounds (based on rare earths, that is, Ln 2 Ti 2 O 7 ) are obtained by solidstate reactions at elevated temperatures, 25,29 rf cosputtering deposition, 30,31 and hydroxide coprecipitation followed by freeze-drying. 26,32 In our case, the pyrochlore structure Tm 2 Ti 2 O 7 was obtained using a solution-based method of synthesis.…”
Section: Xrdmentioning
confidence: 99%
“…This can be studied from the O 1s XPS spectra. [32]. Figure 2d demonstrates how the amount of O in the adsorbed species increases with the Tm concentration.…”
Section: X-ray Photoelectron Spectroscopymentioning
confidence: 95%