Structural properties and sensing performance of high-k Nd2TiO5 thin layer-based electrolyte–insulator–semiconductor for pH detection and urea biosensing

Pan, Tung-Ming; Lin, J. Y.; Wu, Min‐Hsien; Lai, Chao−Sung

doi:10.1016/j.bios.2009.02.018

Cited by 30 publications

(11 citation statements)

References 36 publications

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“…It is clear that the room temperature TiO 2 thin film shows higher sensitivity and good linearity compared to that of 200 ∘ C. This result could be attributed to the higher surface roughness of TiO 2 thin film deposited at room temperature compared to the one deposited at 200 ∘ C as observed in the previous surface morphology images ( Figure 2) and also from AFM roughness analysis (Figure 3). As reported by many [21][22][23][24], higher surface roughness gives better pH sensitivity. Although both thin films are amorphous as observed by Raman spectroscopy, it can be expected that the thin film deposited at room temperature has a lower degree of crystallinity compared to the sample deposited at 200 ∘ C which may facilitate more binding sites that relates to higher sensitivity [25].…”

Section: Egfet Sensor Characterizationsmentioning

confidence: 62%

EGFET pH Sensor Performance Dependence on Sputtered TiO₂Sensing Membrane Deposition Temperature

et al. 2016

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Titanium dioxide (TiO2) thin films were sputtered by radio frequency (RF) magnetron sputtering method and have been employed as the sensing membrane of an extended gate field effect transistor (EGFET) for pH sensing detection application. The TiO2thin films were deposited onto indium tin oxide (ITO) coated glass substrates at room temperature and 200°C, respectively. The effect of deposition temperature on thin film properties and pH detection application was analyzed. The TiO2samples used as the sensing membrane for EGFET pH-sensor and the current-voltage (I-V), hysteresis, and drift characteristics were examined. The sensitivity of TiO2EGFET sensing membrane was obtained from the transfer characteristic (I-V) curves for different substrate heating temperatures. TiO2thin film sputtered at room temperature achieved higher sensitivity of 59.89 mV/pH compared to the one deposited at 200°C indicating lower sensitivity of 37.60 mV/pH. Moreover the hysteresis and the drift of TiO2thin film deposited at room temperature showed lower values compared to the one at 200°C. We have also tested the effect of operating temperature on the performance of the EGFET pH-sensing and found that the temperature effect was very minimal.

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Section: Egfet Sensor Characterizationsmentioning

confidence: 62%

EGFET pH Sensor Performance Dependence on Sputtered TiO₂Sensing Membrane Deposition Temperature

et al. 2016

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“…In general, the drift property is compared by calculating the drift rate, V reference /h. The drift rate in this work was, however, impossible to calculate and be compared to those of other references [8,11]. This is caused by a dynamic change in the drift curves with time as shown in Fig.…”

Section: Resultsmentioning

confidence: 82%

“…In addition, the slopes of the drift curves before and after 200 min become larger for the sensors with longer NWs. Dynamic variation in the drift curves has been observed in some reports [11,12], however, the origins of the dynamic variation of the drift curves are not well-understood by the sensor community yet. …”

Section: Resultsmentioning

confidence: 96%

Silicon Nanowire Integrated Electrolyte-Insulator-Semiconductor Sensor with an Above-Nernstian Sensitivity for Bio-Sensing Applications

Jang

Cho

et al. 2012

MRS Proc.

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Highly sensitive electrolyte-insulator-semiconductor (EIS) sensors were realized by the integration of Si nanowires (NWs), which were fabricated by using a simple and economic electroless wet etching technique. EIS sensors with NWs longer than 1 μm were observed to have considerably increased capacitance and high pH sensitivity. The pH sensitivity of the EIS sensor with 3.8 μm long NWs was 60.2 mV/pH, which is higher than the theoretical Nernstian of 59 mV/pH. The EIS sensors with NWs exhibited slightly worse pH hysteresis and drift properties than that of the conventional planar type EIS sensor. The increases in pH sensitivity, hysteresis and drift are attributable to the extended surface area of the EIS sensors enabled by the NWs. INTRODUCTIONEIS sensor can detect a small variation in the concentration change of ions at the gate by measuring the capacitance change of its system [1]. It has been attracting interests owing to its bio-chemical sensing capability, fast response, and simple and miniaturized structures. EIS sensors, however, were not widely used because they have shortcomings, such as sensing limit lower than the the Nernstian (59 mV/pH), small capacitance, and low reliability. Diverse materials and structures, such as high-k dielectric materials and porous Si have been applied to EIS sensors in order to improve sensing capability and reliability of the sensors [2,3].Similar to the porous Si EIS sensors, Si NWs were employed to increase the surface area of EIS sensors. There are ample number of publications on NW based sensors, however, the integration of electroless wet-etched Si NWs into EIS sensors was demonstrated for the first time in this work. The electroless wet etch technique allows us to fabricate uniform Si NWs in a large substrate without using expensive tools and a number of hazardous chemicals. A slight disadvantage of the NW EIS sensors is that it needs relatively more careful handling because NWs are not mechanically robust. However, the extended gate structrure of an EIS sensor can address this issue [4]. In the present work, sensing capabilities such as pH sensitivity and reliability as well as structural characterization of NW integrated EIS sensors were discussed.

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“…The unique structural characteristics have found applications as ionic conductors, immobilizer for nuclear solid waste, and photocatalyst . Low phonon energies, large solubility of rare‐earth ions, large refractive indices, along with the thermal stability and robust mechanical properties, make these

{normalA}_{2} (B_{2 - x} A_{x}) {normalO}_{7 - x / 2}

crystals very promising for optical applications. In addition, optical properties of rare‐earth ions can be further tuned through structural modulation of

{normalA}_{2} (B_{2 - x} A_{x}) {normalO}_{7 - x / 2}

crystals since their structures can be changed from pyrochlore to disordered pyrochlore and defect‐fluorite structure depending on the relative size of lanthanide ions and titanium ions, concentration, and thermal history .…”

Section: Introductionmentioning

confidence: 99%

Structure and emission properties of glass‐ceramics containing (Eu,Yb)₂TiO₅ nanocrystals

Wei

Han

Liu

et al. 2019

Int J of Appl Glass Sci

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Potential of oxide glass-ceramics containing defect-fluorite nanocrystals as host matrix for rare-earth ions for efficient spectral conversion is investigated. The oxide glass-ceramics embedded with defect fluorite pyrochlore (Eu,Yb) 2 TiO 5 nanocrystals are prepared through melt-quenching and subsequent heat-treatment. It turns out that part of Eu 3+ and Yb 3+ ions are incorporated into the oxide nanocrystals, and Eu 3+ ions remained in the glassy phase are reduced into Eu 2+ ions. Blue emission from Eu 2+ ions, red emission from Eu 3+ ions, and near-infrared emission from Yb 3+ ions are generated and modulated by excitation wavelength. These features make oxide glass-ceramics containing defect-fluorite (Eu,Yb) 2 TiO 5 nanocrystals promising as host for rare-earth ions for efficient spectral conversion. K E Y W O R D Sglass forming systems-annealing, glass manufacturing-glass, glass manufacturing-luminesence, optical properties, oxide glass-caramics

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Structural properties and sensing performance of high-k Nd2TiO5 thin layer-based electrolyte–insulator–semiconductor for pH detection and urea biosensing

Cited by 30 publications

References 36 publications

EGFET pH Sensor Performance Dependence on Sputtered TiO₂Sensing Membrane Deposition Temperature

EGFET pH Sensor Performance Dependence on Sputtered TiO₂Sensing Membrane Deposition Temperature

Silicon Nanowire Integrated Electrolyte-Insulator-Semiconductor Sensor with an Above-Nernstian Sensitivity for Bio-Sensing Applications

Structure and emission properties of glass‐ceramics containing (Eu,Yb)₂TiO₅ nanocrystals

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Structural properties and sensing performance of high-k Nd2TiO5 thin layer-based electrolyte–insulator–semiconductor for pH detection and urea biosensing

Cited by 30 publications

References 36 publications

EGFET pH Sensor Performance Dependence on Sputtered TiO2Sensing Membrane Deposition Temperature

EGFET pH Sensor Performance Dependence on Sputtered TiO2Sensing Membrane Deposition Temperature

Silicon Nanowire Integrated Electrolyte-Insulator-Semiconductor Sensor with an Above-Nernstian Sensitivity for Bio-Sensing Applications

Structure and emission properties of glass‐ceramics containing (Eu,Yb)2TiO5 nanocrystals

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EGFET pH Sensor Performance Dependence on Sputtered TiO₂Sensing Membrane Deposition Temperature

EGFET pH Sensor Performance Dependence on Sputtered TiO₂Sensing Membrane Deposition Temperature

Structure and emission properties of glass‐ceramics containing (Eu,Yb)₂TiO₅ nanocrystals