2000
DOI: 10.1016/s0257-8972(99)00591-5
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Structural properties and surface morphology of laser-deposited amorphous carbon and carbon nitride films

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Cited by 125 publications
(46 citation statements)
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“…Firstly, from the electron energy loss spectra of our samples [6,7] we expect the same electronic behavior from CN x ®lms and DLC ®lms rich of sp 3 hybridization, instead a dierent behavior is expected from DLC ®lms poor of sp 3 hybridization. Secondly the DLC and CN x ®lms are insulating materials, while graphite has a quasi-metallic character.…”
Section: Discussionmentioning
confidence: 69%
See 1 more Smart Citation
“…Firstly, from the electron energy loss spectra of our samples [6,7] we expect the same electronic behavior from CN x ®lms and DLC ®lms rich of sp 3 hybridization, instead a dierent behavior is expected from DLC ®lms poor of sp 3 hybridization. Secondly the DLC and CN x ®lms are insulating materials, while graphite has a quasi-metallic character.…”
Section: Discussionmentioning
confidence: 69%
“…Amorphous carbon thin ®lms were grown by pulsed laser deposition in an ultra high vacuum chamber at the base pressure of p 10 À9 Torr with laser¯uences in the range I L 1±12 J/cm 2 , as described elsewhere [6,7]. In a previous study [6] we have characterized these ®lms by X-ray photoelectron spectroscopy, electron energy loss spectroscopy and Raman spectroscopy revealing an increasing fraction of sp 3 hybridization with increasing laser¯uence (34% at I L 1 J/cm 3 to 53% at I L 12 J/cm 2 ). The CN x ®lms were grown in a nitrogen atmosphere of 100 m Torr yielding an atomic nitrogen content in the range 0:2 < x < 0:3.…”
Section: Methodsmentioning
confidence: 99%
“…In the case of the DLC film, the peak appearing at 284.6 eV corresponds to the sp 2 contribution characteristic of DLC [20,21], while that at 285.5 eV corresponds to the sp 3 contribution [20,21]. In the present case, the peak at 287.1 eV does not necessarily correspond to a different chemical species rather, more likely, it accounts for the high binding energy side asymmetry, which is known to exist in the sp 2 contribution [20,21]. Finally, the peak at 288.6 eV corresponds to the presence of C-O bonds.…”
Section: X-ray Photoelectron Spectroscopymentioning
confidence: 99%
“…Since the wide-scan spectra have shown that nitrogen was incorporated into the DLC films, the contributions at 284.6 eV, 285.5 eV, 287.1 eV and 288.6 eV present in the spectra of the treated samples can also be associated with the presence of C-C, C=N, C-N or C≡N and C-O bonds, respectively [21]. We must take into account, however, that…”
Section: X-ray Photoelectron Spectroscopymentioning
confidence: 99%
“…Both carbon allotropes were synthesized by several PVD deposition techniques, such as radio frequency magnetron sputtering (RFMS) [40], [41], direct current magnetron sputtering (DCMS) [42], [36], [43], [21], high power impulse magnetron sputtering (HiPIMS) [21], [38], pulsed laser deposition (PLD) [44], [10], filtered pulsed cathodic arc deposition [10], [45] and ion beam assisted deposition (IBAD) [46]. have thoroughly studied the bonding of N within C matrix in a-CN x , concluding that N incorporation promotes sp 2 hybridization states.…”
Section: Carbon Nitride (Cn X ) Coatings Grown With Pvdmentioning
confidence: 99%