2008
DOI: 10.1002/pssc.200778422
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Structural properties of aluminum nitride bulk single crystals grown by PVT

Abstract: Defect analysis is performed on 1‐inch diameter bulk AlN crystals grown on AlN‐on‐SiC templates by physical vapour transport. The mean density of threading dislocations as evaluated by wet chemical etching is about 4 × 104 cm–2; mosaicity of the crystals is mostly inherited from the quality of the SiC and the AlN‐on‐SiC template used as seed. Comparing crystals grown without and with growth optimization, the dislocation topography is significantly different, and in crystals grown under optimized conditions, lo… Show more

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Cited by 40 publications
(29 citation statements)
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“…The density of LAGBs decreases only slightly from near the seed interface to the crystal top; the same holds for the dislocation density as reported earlier [4]. Obviously, LAGB coalescence and dissolution is less common in growth direction as compared to the preferential mdirection.…”
Section: Lagb Evolution In Aln Bulk Crystalssupporting
confidence: 79%
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“…The density of LAGBs decreases only slightly from near the seed interface to the crystal top; the same holds for the dislocation density as reported earlier [4]. Obviously, LAGB coalescence and dissolution is less common in growth direction as compared to the preferential mdirection.…”
Section: Lagb Evolution In Aln Bulk Crystalssupporting
confidence: 79%
“…The SE image shows small and large etch pits which correspond to edge/mixed and screw type dislocations [6] propagating roughly in c-direction. The small etch pits are sometimes arranged in lines representing LAGBs [4]. The density of large and small etch pits (not including the major LAGBs) is 4×10 5 cm -2 and 3×10 6 cm -2 , respectively.…”
mentioning
confidence: 99%
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“…AlN-on-SiC templates [9] with the SiC part removed as well as bulk AlN substrates are used as seeds. For some of the crystals (most of them grown on bulk AlN substrates), multiple resublimation of the source material prior to growth was employed in order to further reduce oxygen contamination.…”
Section: Methodsmentioning
confidence: 99%
“…sublimation and recondensation of an AlN charge placed in a tungsten crucible, as reported earlier. For this study, spontaneously nucleated free-standing crystals [9] as well as crystals seeded on AlN templates [10] are cut into wafers, which are then polished on both faces. As evidenced by mass spectrometry and inert gas fusion, oxygen content is about 100 ppm wt; all other impurities except carbon (and possibly hydrogen) are well below 2 ppm wt.…”
mentioning
confidence: 99%