Structural, surface, and thermomechanical properties of intrinsic and argon implanted tetrahedral amorphous carbon

Abstract

The structural, surface, and thermomechanical properties of intrinsic and argon incorporated tetrahedral amorphous carbon films deposited using the filtered cathodic vacuum arc process are reported. Argon atoms were simultaneously incorporated during the deposition of the films using an argon ion gun in the energy range of 0–180 eV. Contact angle measurements revealed that all of the deposited films are hydrophobic, regardless of the substrate bias voltage that was applied during the depositions. Thermal desorption spectroscopy measurements revealed that high argon bombarding energy favors films that are structurally more compact and thermally more stable. An investigation unbinding the mechanism of argon effusion and intrinsic stress relief is presented.

Correlations between microstructure and hydrophobicity properties of pulsed laser deposited diamond-like carbon films

“…Ion beam deposition, Mass-selected ion beam deposition (MSIB), and filtered arc cathode deposition (FCVA) have been used to deposit hydrogen free DLC films [16][17][18][19]. Z. Tang et al [16] have been investigated DLC films deposited using the MSIB method and observed that the DLC films with high optical band gap, low surface roughness and high thermal stability obtained through mass-selected carbon ions species with ion energy of 100 eV.…”

Complete characterization by Raman spectroscopy of the structural properties of thin hydrogenated diamond-like carbon films exposed to rapid thermal annealing

“…1, [54][55][56][57][58][59][60][61][62][63][64][65][66][67][68][87][88][89][90] The D band is a breathing mode of A 1g symmetry, and its intensity is strictly related to the occurrence of six-fold aromatic rings in the scattering medium. Table I) which reduces aromatic ring formation.…”

“…By correct interpretation of the different parameters derived from the spectral analysis from curve fitting of MW Raman 35,[54][55][56][57][58][59][60][61][62][63][64][65][66][67][68] and PL 38-40,69-73 spectra, we report that it is possible to distinguish between DLC:H films with minute differences in bonding configuration, microstructure, and hydrogen content and to follow their thermally induced structural evolution. Most importantly, we introduce a new analysis method of Raman spectra that permits distinguishing between films prepared with different density, thickness, and RTA treatment.…”

“…The objective of the present paper is to demonstrate that it is possible to completely characterize the structural properties of as-deposited and post-annealed DLC:H films and to resolve the structural differences between different types of films by using multi-wavelength (MW) Raman spectroscopy 35,[54][55][56][57][58][59][60][61][62][63][64][65][66][67][68] and photoluminescence (PL) spectroscopy. [38][39][40][69][70][71][72][73] During data analysis, the key to achieve a complete and comprehensive structural characterization is (a) to take account of both the structural and topological disorder of the amorphous network, (b) be aware that the evolution of the sp 2 and sp 3 phases can in principle be independent, (c) that this evolution depends on the treatment of the film post-deposition, and finally (d) that sp 2 clusters possess locally different band gaps that are more or less resonant with different Raman laser wavelengths.…”

The Effect of Stress in the Density of States of Amorphous Carbon Films Determined by X-Ray Excited Auger Electron Spectroscopy

“…The "knock-on" process transforms sp 2 into sp 3 bonds, which is responsible for the increase in the compressive stress of the films [13,[18][19][20]. For energies above 100 eV, the stress reaches a limit with a subtle decrease trend towards higher energy due to the "thermal spike" effect, which promotes a distortion in the carbon matrix creating defects and consequent relaxation of the network.…”