1999
DOI: 10.1134/1.1259498
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Structural transitions and phase transitions in titanium thin films under irradiation by a nitrogen-hydrogen plasma

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Cited by 5 publications
(3 citation statements)
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“…[12][13][14][15][16][17][18][19] N 2 -H 2 plasmas have also been applied to prepare III-V and nitride IV semiconductors and to the chemical synthesis of NH 3 . 10,17,[20][21][22][23][24][25][26][27][28][29][30][31][32][33][34][35] Similarly to other plasma processes, it is worthwhile investigating the chemical species in the gas phase of the plasma using various plasma diagnostic methods. Until now, the most frequently used plasma-diagnostics method for N 2 plasmas has been optical emission, which gives us information on excited molecules, radicals, atoms, and ions.…”
Section: Introductionmentioning
confidence: 99%
“…[12][13][14][15][16][17][18][19] N 2 -H 2 plasmas have also been applied to prepare III-V and nitride IV semiconductors and to the chemical synthesis of NH 3 . 10,17,[20][21][22][23][24][25][26][27][28][29][30][31][32][33][34][35] Similarly to other plasma processes, it is worthwhile investigating the chemical species in the gas phase of the plasma using various plasma diagnostic methods. Until now, the most frequently used plasma-diagnostics method for N 2 plasmas has been optical emission, which gives us information on excited molecules, radicals, atoms, and ions.…”
Section: Introductionmentioning
confidence: 99%
“…At a temperature of 500 • C, the nitrogen concentration in titanium increases and the Ti 2 N phase is formed, and starting from a temperature of 550 • C, a two-phase state of TiN + Ti 2 N is observed. A further increase in temperature leads to a complete rearrangement of the crystal lattice into a cubic one and the formation of the TiN phase [16]. A similar sequence of phase formation is retained in a gas mixture of nitrogen with argon with an increase in the nitrogen concentration [10].…”
Section: Introductionmentioning
confidence: 83%
“…Titanium oxide coatings are known for their high biocompatibility by increasing cytocompatibility, reducing metal corrosion and toxic ion release. Titanium oxide coatings due to their microporous and large surface area facilitate the attachment of osteoblasts to the implant surface [16]. This is due to a significant increase in the area and wettability of the microporous surface of the sample.…”
Section: Introductionmentioning
confidence: 99%