Structure-air damping coupling analysis of micromachined gyroscope

Wang, Weihui; Luo, Zixue; Dan, Qiang; Xu, Yong; Liu, Sheng

doi:10.1109/icept.2013.6756691

Cited by 5 publications

(5 citation statements)

References 6 publications

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“…The empirical calculation formulas of the gas resistance damping coefficient c 1 , surface slide-film damping coefficient c 2 and squeeze-film damping coefficient c 3 are as follows [11][12][13]:…”

Section: Theoretical Model Of Q Airmentioning

confidence: 99%

“…(a) Air resistance damping refers to the fact that the gas around the resonance element has a velocity gradient from the surface boundary layer to infinity, which is difficult to estimate, and an empirical calculation formula was proposed in [11]. (b) The slide-film damping is mainly determined by the air thickness of the upper and lower surfaces, and Wang et al [12] provides an experienced formula when the air thickness is much larger than the size of quartz DETF. (c) For quartz DETF, as a resonant element with a micron-scale, squeeze-film damping usually appears in the thickness direction of the tuning fork tine, and it was analysed (analytical, simulation or experiment) in [11,13].…”

Section: Introductionmentioning

confidence: 99%

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The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification

Zhang

Zhao

et al. 2021

J. Micromech. Microeng.

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Due to the excellent material properties of crystal quartz and its simple and effective structure, the quartz double ended tuning fork (DETF) is widely used as a resonance sensing element in resonator sensors, where its quality factor has an important effect on the overall accuracy and stability of such sensors. To optimise the quality factor of quartz DETF, the influence of structural dimensions on structural and air damping is analysed, and the theoretical model used to calculate the quality factor is summarised. Further, under the premise of fabricating resonators with sufficient force–frequency sensitivity, the quality factors of quartz DETFs of different structural dimensions are simulated through finite element simulation. The theoretical model and simulation calculation of the quality factor of quartz DETFs mutually verify its effectiveness. Moreover, an experimental platform was built, and three quartz DETFs with different dimensions were fabricated to test their quality factor. The quality factors of the three DETFs in air and vacuum are 3467.3, 1925.8, 4442.4 and 32 997.6, 11 559.1, 24 795.7, respectively, which means that the environmental factors and their structural dimensions have a great influence on quality factor. With the simulation method and summarised theoretical model in this paper, the quality factor was studied with comprehensive structural damping (thermal damping loss and support loss) and air damping (resistance damping, slide film damping, and squeeze film damping). The influence of the structure size on the quality factor was analysed in detail, including the length of the decoupling region, the distance between the tines, and the length and width of the tines, and the main influencing factors were obtained, providing a basic and comprehensive reference for designing quartz DETF.

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Section: Theoretical Model Of Q Airmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification

Zhang

Zhao

et al. 2021

J. Micromech. Microeng.

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“…It is worth noting that ZRO has a fixed zero bias after phase compensation and quadrature correction due to the in-phase coupling. The cobweb-like DRG used in this study is packaged in high vacuum, the Q value is as high as 1.8 × 10 5 , the damping coefficient c is very small, and the damping coupling force amplitude A I is four orders of magnitude smaller than the quadrature force amplitude A q [24]. For this reason, the ZRO value is very small, i.e.…”

Section: Performance Analysis Of Circuit Phase Delay Compensationmentioning

confidence: 99%

Effect of circuit phase delay on bias stability of MEMS gyroscope under force rebalance detection and self-compensation method

Guo

Cheng

et al. 2019

J. Micromech. Microeng.

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Bias stability is an important performance indicator for MEMS gyroscopes. In this paper, a gyroscope zero rate output (ZRO) model under force-to-rebalance (FTR) closed-loop detection is presented, and the effect of circuit phase delay and various noises on the ZRO is analyzed. Based on the fact that the two feedback forces in the FTR system are insensitive to the phase delay of the sense mode, while they are sensitive to the phase delay of the drive mode, a method for quickly calculating the circuit phase delay is proposed, and an all-pass filter is used to realize one-time automatic compensation for the phase delay in the drive mode. The control system is implemented with an FPGA. The experimental results show that this method can be used to accurately calculate the circuit phase delay and that phase compensation can be used to effectively reduce the effect of quadrature error on ZRO. This technique provides bias instability and angle random walk performances of 0.338° h −1 and 0.061 ° (√h) −1 , respectively. In addition, the sensitivity of ZRO to temperature at 0 °C to 70 °C has reached 0.001°/s/°C.

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Section: Damping Effectmentioning

confidence: 99%

“…Investigations of Wang et al (2013) and Kim et al (2011) on the effect of pressure on the damping and the quality factor of MEMS showed that the quality factor and the pressure of medium are inversely proportional. Wang et al (2013) proposed a method for the determination of air damping coefficient and the quality factor of the MEMS gyroscopes under the different cavity pressures at the room temperature. It was demonstrated that decreasing the pressure yields a larger quality factor; however, the influence of temperature, which might seriously affect the results, was not considered in this research work.…”

Section: Damping Effectmentioning

confidence: 99%

A review of the most important failure, reliability and nonlinearity aspects in the development of microelectromechanical systems (MEMS)

Rafiee

Khatibi

Zehetbauer

2017

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Purpose The purpose of this paper is to provide an overview of the major reliability issues of microelectromechanical systems (MEMS) under mechanical and environmental loading conditions. Furthermore, a comprehensive study on the nonlinear behavior of silicon MEMS devices is presented and different aspects of this phenomenon are discussed. Design/methodology/approach Regarding the reliability investigations, the most important failure aspects affecting the proper operation of the MEMS components with focus on those caused by environmental and mechanical loads are reviewed. These studies include failures due to fatigue loads, mechanical vibration, mechanical shock, humidity, temperature and particulate contamination. In addition, the influence of squeeze film air damping on the dynamic response of MEMS devices is briefly discussed. A further subject of this paper is discussion of studies on the nonlinearity of silicon MEMS. For this purpose, after a description of the basic principles of nonlinearity, the consequences of nonlinear phenomena such as frequency shift, hysteresis and harmonic generation and their effects on the device performance are reviewed. Special attention is paid to the mode coupling effect between the resonant modes as a result of energy transfer because of the nonlinearity of silicon. For a better understanding of these effects, the nonlinear behavior of silicon is demonstrated by using the example of Si cantilever beams. Findings It is shown that environmental and mechanical loads can influence on proper operation of the MEMS components and lead to early fracture. In addition, it is demonstrated that nonlinearity modifies dynamic response and leads to new phenomena such as frequency shift and mode coupling. Finally, some ideas are given as possible future areas of research works. Originality/value This is a review paper and aimed to review the latest manuscripts published in the field of reliability and nonlinearity of the MEMS structures.

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Structure-air damping coupling analysis of micromachined gyroscope

Cited by 5 publications

References 6 publications

The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification

The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification

Effect of circuit phase delay on bias stability of MEMS gyroscope under force rebalance detection and self-compensation method

A review of the most important failure, reliability and nonlinearity aspects in the development of microelectromechanical systems (MEMS)

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