1985
DOI: 10.1007/bf00802510
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Structure and composition of titanium diboride coatings

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“…TiB 2 -based coatings have been produced by different deposition techniques, including vacuum plasma spraying, [6] electrodeposition from a molten alkali metal borate bath, [6] chemical vapor deposition (CVD) from diborine, [7] laser-induced CVD, [8] direct evaporation from compact billets, [9] electron-beam evaporation from a sintered TiB 2 target, [10] ionbeam enhanced evaporation, [11] magnetron sputtering, [6] and ion mixing. [8] Some attempts have been made to overcome their brittleness by using multilayers, reactive sputtering (N, C, BF 3 , B 2 H 6 ), or co-sputtering (Ti + B, Ti + B particles) and heavy ion bombardment (Kr, Ar, Xe).…”
mentioning
confidence: 99%
“…TiB 2 -based coatings have been produced by different deposition techniques, including vacuum plasma spraying, [6] electrodeposition from a molten alkali metal borate bath, [6] chemical vapor deposition (CVD) from diborine, [7] laser-induced CVD, [8] direct evaporation from compact billets, [9] electron-beam evaporation from a sintered TiB 2 target, [10] ionbeam enhanced evaporation, [11] magnetron sputtering, [6] and ion mixing. [8] Some attempts have been made to overcome their brittleness by using multilayers, reactive sputtering (N, C, BF 3 , B 2 H 6 ), or co-sputtering (Ti + B, Ti + B particles) and heavy ion bombardment (Kr, Ar, Xe).…”
mentioning
confidence: 99%