Structure and depth profile composition analysis of Cr/(B4C)/V/(B4C) multilayer for water window application

Пин, Ли; Huang, Qiushi; Jiang, Li; Li, Wenbin; Fei, Jiani; Zhu, Jie; Zhang, Zhong; Wang, Zhanshan

doi:10.1016/j.vacuum.2016.02.014

Cited by 9 publications

(4 citation statements)

References 22 publications

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“…The B4C “layers” were added at both interfaces. This barrier layer was proved to be very effective in reducing the interface width of Cr/Sc 9 and Cr/V multilayers 11 , 18 . For the two samples, the V and Sc layer thickness were decreased equally in order to keep the d-spacing of 1.59 nm unchanged.…”

Section: Resultsmentioning

confidence: 99%

“…Secondly, the multilayers were deposited under a moderate base vacuum of 6.0 × 10 −5 Pa. Considering the reported chemical analysis results of the Cr/V 18 and Cr/Sc multilayer 12 deposited under a similar base vacuum, a small amount of impurities of O, N and C (not measured by EDX) are expected to be incorporated in the current V/Sc multilayer, probably forming oxides, carbides or nitrides. These contaminations could have a considerable effect on the reflectance, as indicated by Eriksson and thus need to be analyzed and controlled 22 .…”

Section: Discussionmentioning

confidence: 99%

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High Reflectance Nanoscale V/Sc Multilayer for Soft X-ray Water Window Region

Huang

Cao

et al. 2017

Sci Rep

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V/Sc multilayer is experimentally demonstrated for the first time as a high reflectance mirror for the soft X-ray water window region. It primarily works at above the Sc-L edge (λ = 3.11 nm) under near normal incidence while a second peak appears at above the V-L edge (λ = 2.42 nm) under grazing incidence. The V/Sc multilayer fabricated with a d-spacing of 1.59 nm and 30 bilayers has a smaller interface width (σ = 0.27 and 0.32 nm) than the conventional used Cr/Sc (σ = 0.28 and 0.47 nm). For V/Sc multilayer with 30 bilayers, the introduction of B4C barrier layers has little improvement on the interface structure. As the number of bilayers increasing to 400, the growth morphology and microstructure of the V/Sc layers evolves with slightly increased crystallization. Nevertheless, the surface roughness remains to be 0.25 nm. A maximum soft X-ray reflectance of 18.4% is measured at λ = 3.129 nm at 9° off-normal incidence using the 400-bilayers V/Sc multilayer. According to the fitted model, an s-polarization reflectance of 5.2% can also be expected at λ = 2.425 nm under 40° incidence. Based on the promising experimental results, further improvement of the reflectance can be achieved by using a more stable deposition system, exploring different interface engineering methods and so on.

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Section: Resultsmentioning

confidence: 99%

Section: Discussionmentioning

confidence: 99%

High Reflectance Nanoscale V/Sc Multilayer for Soft X-ray Water Window Region

Huang

Cao

et al. 2017

Sci Rep

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“…[13,33] The peaks at the binding energy of 189.4 eV and 191 eV corresponding to elemental state of boron and oxides, respectively. [20,34,35] (d) Compared with the B 1𝑠 spectrum of the B 4 C coating deposited with pure Ar, the B 1𝑠 peak of the nitrided B 4 C coating shifts to higher binding energy. In Ref.…”

Section: -2mentioning

confidence: 99%

Stress, Roughness and Reflectivity Properties of Sputter-Deposited B₄C Coatings for X-Ray Mirrors*

Wu¹,

Qi²,

Huang³

et al. 2019

Chinese Phys. Lett.

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Boron carbide (B 4 C) coatings have high reflectivity and are widely used as mirrors for free-electron lasers in the x-ray range. However, B 4 C coatings fabricated by direct-current magnetron sputtering show a strong compressive stress of about −3 GPa. By changing the argon gas pressure and nitrogen-argon gas mixing ratio, we are able to reduce the intrinsic stress to less than −1 GPa for a 50-nm-thick B 4 C coating. It is found that the stress in a coating deposited at 10 mTorr is −0.69 GPa, the rms roughness of the coating surface is 0.53 nm, and the coating reflectivity is 88%, which is lower than those of coatings produced at lower working pressures. When the working gas contains 8% nitrogen and 92% argon, the B 4 C coating shows not only −1.19 GPa stress but also a low rms roughness of 0.16 nm, and the measured reflectivity is 93% at the wavelength of 0.154 nm.

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“…Já os métodos destrutivos utilizam um canhão de íons para promover a erosão da amostra, expondo assim as camadas mais internas do material a ser analisado. O uso de íons de argônio para bombardear a superfície da amostra é muito empregado atualmente, em especial para superfícies metálicas [134][135][136]. No entanto, os feixes de íons singulares (single ion beam) não são muito eficientes para a remoção de matérias poliméricos, já que a remoção do material costuma ocorrer de forma muito irregular [137].…”

Section: Carboximetilcelulose (Cmc)unclassified

Recobrimentos antimicrobianos e nanoestruturados contendo quitosana produzidos pela técnica de automontagem ("layer-by-layer") para substratos têxteis

Taketa¹

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Ao Professor Diego Mantovani e à Doutora Pascale Chevallier pelo grande auxílio prestado durante a minha visita técnica à Université Laval. Foi uma experiência científica e cultural muito proveitosa para mim. Agradeço à Prof. a Mariana Altenhofen da Silva por toda a instrução recebida durante suas participações em minhas apresentações. Obrigado por sua leitura dedicada, pelas críticas e elogios que ajudaram na construção do texto aqui apresentado.

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Structure and depth profile composition analysis of Cr/(B4C)/V/(B4C) multilayer for water window application

Cited by 9 publications

References 22 publications

High Reflectance Nanoscale V/Sc Multilayer for Soft X-ray Water Window Region

High Reflectance Nanoscale V/Sc Multilayer for Soft X-ray Water Window Region

Stress, Roughness and Reflectivity Properties of Sputter-Deposited B₄C Coatings for X-Ray Mirrors*

Recobrimentos antimicrobianos e nanoestruturados contendo quitosana produzidos pela técnica de automontagem ("layer-by-layer") para substratos têxteis

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Structure and depth profile composition analysis of Cr/(B4C)/V/(B4C) multilayer for water window application

Cited by 9 publications

References 22 publications

High Reflectance Nanoscale V/Sc Multilayer for Soft X-ray Water Window Region

High Reflectance Nanoscale V/Sc Multilayer for Soft X-ray Water Window Region

Stress, Roughness and Reflectivity Properties of Sputter-Deposited B4C Coatings for X-Ray Mirrors*

Recobrimentos antimicrobianos e nanoestruturados contendo quitosana produzidos pela técnica de automontagem ("layer-by-layer") para substratos têxteis

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Stress, Roughness and Reflectivity Properties of Sputter-Deposited B₄C Coatings for X-Ray Mirrors*