2011
DOI: 10.1088/0268-1242/26/8/085023
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Structure and electrical characteristics of AlGaN/GaN MISHFET with Al2O3thin film as both surface passivation and gate dielectric

Abstract: An AlGaN/GaN metal-insulator-semiconductor heterostructure field-effect transistor (MISHFET) with about 40 nm Al 2 O 3 for both surface passivation and gate dielectric has been investigated and compared with the regular metal-semiconductor heterostructure field-effect transistor (MESHFET). The output characteristic measurements have shown that the MISHFET yielded 34% increase of the saturation drain current compared to the MESHFET. The Hall effect measurements of AlGaN/GaN two-dimensional electron gas (2DEG) c… Show more

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Cited by 11 publications
(6 citation statements)
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“…The simulated curves exhibit a maximum of 7ms/µm in single channels and 88ms/µm in four channels GAA MOESFT at V DS =1.0 V. This peak appearing in the curve of the transconductance depends mainly on the gate bias V GS and reflects the DC behavior of the simulated MOSFETs, which correspond to the channels modulated by different gate voltages. The DC characteristics obtained for a four channels devices are better, compared with a sample channel device that has obviously a slight inferior electrical properties earlier reported [23][24], the total parasitic resistance is usually dominated at low Ohmic contact resistance which is highly wanted, and can be attributed to the increase of carrier concentration or/and the increase of carrier mobility [25][26][27], We can note from our results that the g m value is more important for our four channel GAA MOEFTS compared to the single channel one . One of the major challenges for the miniaturization of the MOS transistor is to ge t a high report Ion/Ioff.…”
Section: Results and Analysismentioning
confidence: 69%
“…The simulated curves exhibit a maximum of 7ms/µm in single channels and 88ms/µm in four channels GAA MOESFT at V DS =1.0 V. This peak appearing in the curve of the transconductance depends mainly on the gate bias V GS and reflects the DC behavior of the simulated MOSFETs, which correspond to the channels modulated by different gate voltages. The DC characteristics obtained for a four channels devices are better, compared with a sample channel device that has obviously a slight inferior electrical properties earlier reported [23][24], the total parasitic resistance is usually dominated at low Ohmic contact resistance which is highly wanted, and can be attributed to the increase of carrier concentration or/and the increase of carrier mobility [25][26][27], We can note from our results that the g m value is more important for our four channel GAA MOEFTS compared to the single channel one . One of the major challenges for the miniaturization of the MOS transistor is to ge t a high report Ion/Ioff.…”
Section: Results and Analysismentioning
confidence: 69%
“…In the previous study, the maximum saturation drain current was improved by about 34% by Al 2 O 3 gate dielectrics, which was shown in Ref. [22]. It indicates that the SBA thin film was a good candidate for the gate dielectric for an AlGaN/GaN MISHEMT and had a better effect on the output characteristics than Al 2 O 3 .…”
Section: Resultsmentioning
confidence: 72%
“…The voltage distribution across the canal led to a voltage difference between the gate and the channel along it, with the transistor demonstrating a variable resistance behavior controlled by the gate voltage. This indicates excellent gate control of the 2DEG channel [21], and the maximum drain current available reached 644 mA/mm when V GS was biased at 0.5 V & V DS =2.0 V. The pinch-off voltage was found to be −1.0 V, as shown in Figure 2(a).…”
Section: Resultsmentioning
confidence: 77%