2022
DOI: 10.3390/coatings12040431
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Structure and Electrical Properties of Zirconium-Aluminum-Oxide Films Engineered by Atomic Layer Deposition

Abstract: Thin films containing either multilayer ZrO2:Al2O3 structures or ZrO2 deposited on ZrxAlyOz buffer layers were characterized. The films were grown by atomic layer deposition (ALD) at 300 °C from ZrCl4, Al(CH3)3, and H2O. The multilayer ZrO2:Al2O3 structures were grown repeating different combinations of ZrO2 and Al2O3 ALD cycles while the ZrxAlyOz layers were obtained in a novel process using ALD cycles based on successive adsorption of ZrCl4 and Al(CH3)3, followed by surface reaction with H2O. The films were … Show more

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“…However, there is a high possibility of charge leakage due to the small conduction band barrier at the Si 3 N 4 /SiO 2 interface. Therefore, extensive research is currently being conducted on high -k dielectrics such as the metal oxides (Ta 2 O 5 [ 1 ], TiO 2 [ 5 ], HfO 2 [ 6 ], ZrO 2 [ 7 ]) as charge trap layers, because of the higher conduction band barrier at the interface with SiO 2 compared to the Si 3 N 4 for better charge retention.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…However, there is a high possibility of charge leakage due to the small conduction band barrier at the Si 3 N 4 /SiO 2 interface. Therefore, extensive research is currently being conducted on high -k dielectrics such as the metal oxides (Ta 2 O 5 [ 1 ], TiO 2 [ 5 ], HfO 2 [ 6 ], ZrO 2 [ 7 ]) as charge trap layers, because of the higher conduction band barrier at the interface with SiO 2 compared to the Si 3 N 4 for better charge retention.…”
Section: Introductionmentioning
confidence: 99%
“…Among the high -k metal oxides, zirconium oxide or zirconia (ZrO 2 ) has received much attention for various low-voltage electronic applications such as memory devices [ 7 ], light-emitting diodes [ 8 ], thin-film transistors (TFTs) [ 9 ] and solar cells [ 10 ] due to its high trap-state density, optical transparency and large band gap as a result of the low valence band energy level. In order to form high-quality ZrO 2 layers, various vacuum deposition methods such as sputtering [ 11 ] and atomic layer deposition [ 7 ] have been used. These processes are characterized by sophisticated equipment and complex procedures making them highly costly.…”
Section: Introductionmentioning
confidence: 99%