Structure and mechanical properties of Mo–N/Cu films produced by inductively coupled plasma reactive sputtering

Kim, J.N.; Park, Somi; Kim, Taeyoon; Lee, J.J.

doi:10.1016/j.tsf.2011.04.045

Cited by 19 publications

(15 citation statements)

References 19 publications

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“…However, with the increase of N2 partial pressure, the peak intensity of (200) plane decreased gradually with simultaneous peak broadening being observed, which was typical for the grain refinement. Similar results had been reported by Kim et al; the peak intensity decreased with increase in nitrogen flow rate [15]. When the N2 flow rate increased, N provided reaction sites, which in turn increased nucleation sites, and then reduced the grain growth.…”

Section: Microstructure and Mechanical Propertiessupporting

confidence: 89%

“…The typical wear rate values for solid lubricants with moderate wear resistance were between 10 −7 and 10 −5 mm 3 /N•m [14,39]. Therefore, the excellent tribological properties could be attributed to the mixed lubricious oxides of MoO 2 , CuO and V 2 O 5 formed during tribo-oxidation, which usually lead to lower friction coefficients and better wear resistance [15]. When the wear temperature was increased up to 400 • C, despite of the forming of lubricious oxides of MoO 3 /CuMoO 4 and V 2 O 5 , the high wear rate increased from 3.1 × 10 −6 to 13.5 × 10 −6 mm 3 /N•m with increasing the N 2 partial pressure, which was higher two orders of magnitude than of at 25 • C. It could be mainly due to the loss of nitrogen and pronounced oxidation at high temperatures, which led the wear mechanism to be transformed from mild oxidation wear to severe oxidation wear.…”

Section: Tribological Propertiesmentioning

confidence: 99%

“…In addition, some soft metals also possess lubrication properties due to their low shear strength and high plasticity. Recently, soft metals like Cu have been added into Mo-N coatings to form nanocomposite coatings to achieve better tribological performance [14,15]. Thus, multi-functional self-lubricating coatings can be obtained by the addition of these alloying elements.…”

Section: Introductionmentioning

confidence: 99%

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Influence of Nitrogen Partial Pressure on Microstructure and Tribological Properties of Mo-Cu-V-N Composite Coatings with High Cu Content

et al. 2018

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In this study, Mo-Cu-V-N composite coatings with high Cu content of~18 at.% were deposited on 316L stainless steel and YT14 cemented carbide substrates by high power impulse magnetron sputtering in Ar-N 2 gas mixtures. The influence of N 2 partial pressure was investigated with respect to the microstructure and tribological properties of the coatings. The results indicated that the Mo-Cu-V-N composite coatings exhibited FCC B1-MoN phase with a strong (200) preferred orientation, and Cu phase was found to exist as metallic species. As the N 2 partial pressure increased from 0.11 to 0.35 Pa, the peak intensity of (200) plane decreased gradually and simultaneous peak broadening was observed, which was typical for grain refinement. With increasing the N 2 partial pressure, the columnar microstructure became much coarser, which led to the decrease of residual stress and hardness. The Mo-Cu-V-N composite coatings with high Cu content exhibited a relatively low wear rate of 10 −8 mm 3 /N•m at 25 • C, which was believed to be attributed to the mixed lubricious oxides of MoO 2 , CuO and V 2 O 5 formed during tribo-oxidation, which cannot be formed in the coatings with low Cu content. When the wear temperature was increased up to 400 • C, the wear rate increased sharply up to 10 −6 mm 3 /N•m despite the formation of lubricious oxides of MoO 3 /CuMoO 4 and V 2 O 5. This could be due to the loss of nitrogen and pronounced oxidation at high temperatures, which led the wear mechanism to be transformed from mild oxidation wear to severe oxidation wear.

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Section: Microstructure and Mechanical Propertiessupporting

confidence: 89%

Section: Tribological Propertiesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Influence of Nitrogen Partial Pressure on Microstructure and Tribological Properties of Mo-Cu-V-N Composite Coatings with High Cu Content

et al. 2018

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“…Recently, binary molybdenum nitride (MoN) coatings have attracted much attentions, which exhibit excellent wear resistance due to the unique combination of mechanical properties of Mo-nitride and the lubricating effects of Mo-oxides [1][2][3][4]. The mechanical and tribological properties of Mo-N coatings can be improved by addition other elements [5][6][7]. For example, by incorporation of copper (Cu) atoms into Mo-N coatings, the average coefficient of friction (COF) could be further decreased from 0.4 to 0.2, which was attributed to the formation of lubricating CuMoO 4 oxide [7].…”

Section: Introductionmentioning

confidence: 99%

Influence of lubricious oxides formation on the tribological behavior of Mo-V-Cu-N coatings deposited by HIPIMS

Mei

Luo

Huang

et al. 2019

Surface and Coatings Technology

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The variations of microstructure, mechanical properties, and oxidation behavior of Mo-V-Cu-N coatings are directly correlated to the chemical compositions, which significantly affects their tribological behavior. The aim of this work was to characterize Mo-V-Cu-N coatings with different chemical compositions deposited by high power impulse magnetron sputtering (HIPIMS) using single Mo-V-Cu segmental target, and to investigate the correlations between the lubricative oxides formed on coating surfaces with the variation of tribological behavior at different temperatures. The oxidation of Mo-V-Cu-N coatings started at 400 °C with the lubrication oxides of MoO and Cu-MoO were formed, which led to the decrease in coefficients of friction and wear rates of the coatings. It was found that the rapid outward diffusion of Mo and Cu atoms took place preferentially at around the growth defects (e.g. microparticles and pores). The incorporation of V atoms into Mo-Cu-N coatings enhanced the oxidation resistance at temperatures below 400 °C. At 500 °C, all the fcc B1-MoN and VN phases disappeared due to the severe oxidation, and the V 2 O 5 phase was first appeared. Even though a relatively low coefficient of friction was obtained at 500 °C, the wear resistance of Mo-V-Cu-N coatings was decreased due to the severe oxidation and loss of mechanical strength.

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“…Previously reported results of fabrication of MoN x films used sputtering methods. [5][6][7][8][9][13][14][15][16][17][18] Anitha et al prepared MoN x thin film using rf magnetron sputtering with varying nitrogen gas ratio. The crystallization was determined as Mo 2 N with several phases.…”

Section: Introductionmentioning

confidence: 99%

Surface Characteristics of MoN_x Thin Films Obtained by Reactive rf Magnetron Sputtering in UHV System

Jeong

Park

Choi

et al. 2015

Bulletin Korean Chem Soc

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Molybdenum nitride (MoN x ) thin films were deposited on p-type Si(1 0 0) wafer using reactive radio frequency magnetron sputtering at various nitrogen gas ratios in an ultra high vacuum (UHV) system. Two metallic phases, Mo(1 1 0) and Mo(2 1 1), were detected from the film obtained without nitrogen gas in the sputter gas. The thickness of the films measured with a surface profiler decreased from 186.0 to 21.5 nm with increasing nitrogen gas ratio in the sputter gas from 0 to 100%, respectively. From the X-ray photoelectron spectroscopy (XPS) analysis, Mo species were further oxidized by the addition of nitrogen gas in the sputter gas. As nitrogen gas was introduced, the portion of Mo 4+ species decreased while those of Mo 5+ and Mo 6+ species increased. As the nitrogen gas ratio in the sputter gas increased, the formation of MoN x thin films was confirmed by N 1s XPS spectra. The conductivity decreased from 927.7 to 97.1 S/cm with 0 and 100% of nitrogen gas ratio, respectively.Keywords: Mo nitride, Radio frequency magnetron sputtering, X-ray photoelectron spectroscopy, X-ray diffraction, Conductivity, Ultra high vacuum IntroductionMolybdenum nitride (MoN x ) thin films have been applied as anodes of Ni batteries, 1 catalysts, 2-4 and diffusion barriers [5][6][7][8][9][10][11][12][13][14] because MoN x thin films have outstanding properties for these applications, such as morphology, 3 low resistivity, 13 and hardness.14 Various methods for synthesizing MoN x thin film have been reported including hydrothermal method, 2 cathodic arc evaporation method, 10 chemical solution method, 11 radio frequency (rf ) sputtering, 13-16 dc sputtering, 5-9,17-19 and hightemperature plasma. 20 Previous studies have adapted sputtering methods to fabricate MoN x thin films because it can be applied in low-temperature environment and for large-area substrate. These advantages make sputtering a more efficient method for industry than others. Previously reported results of fabrication of MoN x films used sputtering methods. [5][6][7][8][9][13][14][15][16][17][18] Anitha et al. prepared MoN x thin film using rf magnetron sputtering with varying nitrogen gas ratio. The crystallization was determined as Mo 2 N with several phases. 13 With increasing nitrogen gas ratio from 0 to 89%, resistivity increased from 0.26 to 6.00 μΩm. Kumar et al. used reactive dc magnetron sputtering for deposition of MoN x films as nitrogen gas flow changed from 0 to 20 sccm. Deposition rate of MoN x thin films decreased as nitrogen flow rate increased.6 Crystallinity changed as nitrogen gas ratio increased from γ-Mo 2 N(1 1 1) through β-Mo 2 N(2 0 0), Mo 3 N 2 (1 1 1), Mo 16 N 7 (4 0 0), β-Mo 2 N(2 2 0), and Mo 5 N 6 (1 1 0), to Mo 16 N 7 (4 0 0). Resistivity of MoN x thin films increased from 3.0 × 10 −9 to 1.8 × 10 −6 Ωm as nitrogen ratio increased from 0 to 33%. MoN x thin film was thermally stable below 600 C. However, they did not give any information about composition of the surface and oxidation states of Mo. In this study, we report the results of...

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Structure and mechanical properties of Mo–N/Cu films produced by inductively coupled plasma reactive sputtering

Cited by 19 publications

References 19 publications

Influence of Nitrogen Partial Pressure on Microstructure and Tribological Properties of Mo-Cu-V-N Composite Coatings with High Cu Content

Influence of Nitrogen Partial Pressure on Microstructure and Tribological Properties of Mo-Cu-V-N Composite Coatings with High Cu Content

Influence of lubricious oxides formation on the tribological behavior of Mo-V-Cu-N coatings deposited by HIPIMS

Surface Characteristics of MoN_x Thin Films Obtained by Reactive rf Magnetron Sputtering in UHV System

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Structure and mechanical properties of Mo–N/Cu films produced by inductively coupled plasma reactive sputtering

Cited by 19 publications

References 19 publications

Influence of Nitrogen Partial Pressure on Microstructure and Tribological Properties of Mo-Cu-V-N Composite Coatings with High Cu Content

Influence of Nitrogen Partial Pressure on Microstructure and Tribological Properties of Mo-Cu-V-N Composite Coatings with High Cu Content

Influence of lubricious oxides formation on the tribological behavior of Mo-V-Cu-N coatings deposited by HIPIMS

Surface Characteristics of MoNx Thin Films Obtained by Reactive rf Magnetron Sputtering in UHV System

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Surface Characteristics of MoN_x Thin Films Obtained by Reactive rf Magnetron Sputtering in UHV System