Structure and mechanical properties of diamond-like carbon films with copper functional layer by cathode arc evaporation

A comparison study between atomic and ionic nitrogen doped carbon films prepared by ion beam assisted cathode arc deposition at various pulse frequencies

“…CN x (N 2 ) and CN x (N + ) films were synthesized on silicon (1 0 0) substrate using a typical cathode arc deposition device, as shown in reference [12]. A graphite target of 99.5% purity was used as pulsed evaporation cathode.…”

Effect of Cr Layer on the Structure and Properties of Cr/DLC Films

“…Note that the intensity of the Raman peak increases monochromatically with increasing the Cr layer thickness, which indicated that a thickness of Cr layer would induce the decrease of carbon-carbon (sp 2 or sp 3 ) bonds as a result of high diffusion between Cr and carbon layers [11].…”

“…The internal stress is caused by different deposition process conditions [9]. The intrinsic stress in the films is directly dependent on the deposition rate, ion energy, deposition temperature and residual atmosphere in the chamber, and thus all these parameters were optimized during the sample manufacture based on our previous experience [6,11]. The extrinsic stress is caused by external factors after the film deposition, for example, induced by the reactions of oxygen impurity with C and Cr atoms or absorbance the polar molecules from the atmosphere.…”

Catalytic effect of Al and AlN interlayer on the growth and properties of containing carbon films

“…Usually the drawbacks of DLC material present in their applications have been avoided or reduced by the way of doping element, multilayer films and post-annealing [3][4][5]. Among of them, DLC multilayer films possess high values of adhesion, high wear resistance and low mechanical stress, which are largely determined by the structure, composition and chemical interaction of the interface layer [6][7][8][9].…”

“…The catalytic activity on the phase state of the carbon layer is depending not only on element nature, but also on its dispersion into the multilayer films, especially when the introduced elements can chemically interact with carbon atoms. The physical-chemical processes occurred at the interface of multilayer systems are determined by generation parameters of carbon plasma, regimes and conditions of subsequent processing of the films [8,9]. Therefore the researches on the diffusion and reaction process between layers, the interface interaction model, the feature of the boundary layers in the carbon-based multilayer systems are realistic and significant tasks.…”