Structure and microhardness of TiN compositional and alloyed films

Andrievski, R.A.; Anisimova, I. A.; Anisimov, Vladimir P.

doi:10.1016/0040-6090(91)90299-d

Cited by 78 publications

(20 citation statements)

References 6 publications

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“…The hardness of such films is much higher than the bulk material (HV¼14 GPa) and higher than other binary nitride films (TiN, ZrN, VN). The hardness of the NbN films deposited by different arc deposition systems reaches 34-49 GPa [8][9][10][11][12][13]. The NbN films were also prepared by using magnetron sputtering (MS) [14][15][16][17][18], ion Contents lists available at ScienceDirect journal homepage: www.elsevier.com/locate/ceramint beam assisted deposition [19], pulsed laser deposition [20].…”

Section: Introductionmentioning

confidence: 99%

Structural and mechanical properties of NbN and Nb-Si-N films: Experiment and molecular dynamics simulations

Pogrebnjak

Бондар

Abadias

et al. 2016

Ceramics International

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a b s t r a c tThe structural and mechanical properties of NbN and Nb-Si-N films have been investigated both experimentally and theoretically, in their as-deposited and annealed states. The films were deposited using magnetron sputtering at substrate bias (U B ) between 0 and À 70 V. While NbN films were found to crystallize in the cubic δ-NbN structure, Nb-Si-N films with Si content of 11-13 at% consisted of a twophases nanocomposite structure where δ-NbN nanocrystals were embedded in SiN x amorphous matrix.Films deposited at U B ¼0 V were highly (001)-textured. Application of substrate bias potential led to a depletion of light atoms, and caused a grain size refinement concomitantly with the increase of (111) preferred orientations in both films. The maximum hardness was 28 GPa and 32 GPa for NbN and Nb-Si-N films, respectively. NbN and Nb-Si-N films deposited at U B ¼ À70 V exhibited compressive stress of À 3 and À 4 GPa, respectively. After vacuum annealing, a decrease in the stress-free lattice parameter was observed for both films, and attributed to alteration of film composition. To obtain insights on interface properties and related mechanical and thermal stability of Nb-Si-N nanocomposite films, first principles molecular dynamics simulations of NbN/SiN x heterostructures with different structures (cubic and hexagonal) and atomic configurations were carried out. All the hexagonal heterostructures were found to be dynamically stable and weakly dependent on temperature. Calculation of the tensile strain-stress curves showed that the values of ideal tensile strength for the δ-NbN(111)-and ε-NbN(001)-based heterostructures with coherent interfaces and Si 3 N 4 -like Si 2 N 3 interfaces were the highest with values in the range 36-65 GPa, but lower than corresponding values of bulk NbN compound. This suggests that hardness enhancement is likely due to inhibition of dislocation glide at the grain boundary rather than interfacial strengthening due to Si-N chemical bonding.

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Section: Introductionmentioning

confidence: 99%

Structural and mechanical properties of NbN and Nb-Si-N films: Experiment and molecular dynamics simulations

Pogrebnjak

Бондар

Abadias

et al. 2016

Ceramics International

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“…Upon annealing to ≥600 °C, a nanocomposite structure was formed and the hardness increase to about 40 GPa [13]. Other examples of such selforganization and hardness increase can be found in the work of Andrievski et al [23,24] (see discussion in [1]). …”

Section: Generic Design Concept and Thermal Stability Of Superhard Namentioning

confidence: 84%

Superhard nanocomposite coatings. From basic science toward industrialization

Vepřek

Jílek²

2002

Pure and Applied Chemistry

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A variety of superhard coatings with Vickers plastic hardness exceeding 40 GPa have been reported by several research groups during the last five years (for recent reviews see refs [1,2]). However, one has to distinguish between superhard nanocomposites, such as nc-TiN/a-Si 3 N 4 , nc-TiN/a-Si 3 N 4 /a-and nc-TiSi 2 , nc-(Ti 1-x Al x )N/a-Si 3 N 4 , nc-TiN/TiB 2 , ncTiN/BN, etc. where the high hardness originates from the nanostrucutre and, therefore, remains stable upon annealing to high temperatures [1], and coatings, such as CrN/Ni, ZrN/Ni, and others [2] in which the measured high hardness is due to a high compressive stress that is induced in the coatings due to energetic ion bombardment during their deposition (e.g., by magnetron sputtering). We also summarize the recent progress in the industrial applications of the superhard nanocomposite coatings on machining tools.

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“…It has been speculated that the hardness increase for some ternary ceramic coating 2 nm 20 nm 16 materials at elevated temperatures is caused by phase separation and spinodal decomposition [69][70][71][72][73][74]. However, a critical review reveals that there is a lack in explaining the responsible microstructural changes and providing supporting observation.…”

Section: Nanocomposite Ceramic Thin Filmsmentioning

confidence: 93%

Materials Science of Wear-Protective Nanostructured Thin Films

Hultman

2004

NATO Science Series II: Mathematics, Physics and Chemistry

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Nano-design routes for ceramic thin films by PVD are reviewed. For TiN/NbN superlattices, glide within the layers is the dominant deformation mechanism in support of models for superhardening. Theory presumes plasticity with dislocation hindering at interfaces between phases with different shear modulus. It is shown that the superlattices exhibit crystal rotation near an indent, scratch or wear zone. A concept for age hardening of metastable coating materials is presented for the Ti-Al-N system. Spinodal decomposition with coherent cubic-phase nm-size domains is thus demonstrated, causing an increase in hardness during annealing. Finally, inherently nanolaminated hexagonal M n+1 AX n -phases are considered (n=1,2,3; M=transition metal; A-group element; X=C/N). These phases combine ceramic and metallic properties. MAX phases in thin film form are reported, including Ti 3 SiC 2 and Ti 2 AlN. Nanoindentation combined with electron microscopy reveals kink formation and cohesive delamination on the basal planes of these ductile materials.

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Structure and microhardness of TiN compositional and alloyed films

Cited by 78 publications

References 6 publications

Structural and mechanical properties of NbN and Nb-Si-N films: Experiment and molecular dynamics simulations

Structural and mechanical properties of NbN and Nb-Si-N films: Experiment and molecular dynamics simulations

Superhard nanocomposite coatings. From basic science toward industrialization

Materials Science of Wear-Protective Nanostructured Thin Films

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