Structure and Phase Evolution Characterization of Advanced Materials by Using Temperature-Programmable Resonant Microcantilever in Combination with Raman Spectroscopy (Simultaneous Tg-Raman)

Yao, Fanglan; Jia, Hao; Xu, Pengchen; Li, Xinxin

doi:10.1109/mems51670.2022.9699776

Cited by 4 publications

(2 citation statements)

References 7 publications

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“…To address the limitations in the furnace-based conventional TGA, chip-scale TGA utilizing temperature-controlled micro-electromechanical systems (MEMS) resonant cantilevers have been proposed [10][11][12][13][14]. Quite different from the conventional TGA that measures weight loss by using a balance during heating, the resonant cantilevers directly monitor the mass change (∆m) by using resonance frequency shift (∆f ), based on the relationship that ∆f is linearly proportional to ∆m [15].…”

Section: Introductionmentioning

confidence: 99%

“…Although later, a paddle-shaped silicon nitride cantilever integrated with a polysilicon heater and thermocouple was introduced, such devices still showed a limited temperature range of up to 650 • C [12]. More recently, our group has developed fully integrated MEMS resonant cantilevers with a much higher temperature range of >1000 • C [13,14]. Thanks to the miniature device size, the resonant cantilevers also exhibit an ultrahigh mass resolution down to sub-picogram (10 −12 g), and only nanogram (10 −9 g) samples are required [16,17].…”

Section: Introductionmentioning

confidence: 99%

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MEMS Resonant Cantilevers for High-Performance Thermogravimetric Analysis of Chemical Decomposition

Cao,

Jia,

Zhou

et al. 2023

Sensors

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We investigate the MEMS resonant cantilevers for high-performance thermogravimetric analysis (TGA) of chemical decomposition, featuring high accuracy and minimized thermal lag. Each resonant cantilever is integrated with a microheater for sample heating near the free end, which is thermally isolated from the resonance excitation and readout elements at the fixed end. Combining finite element modeling and experiments, we demonstrate that the sample loading region can stabilize within ~11.2 milliseconds in response to a step heating of 500 °C, suggesting a very fast thermal response of the MEMS resonant cantilevers of more than 104 °C/s. Benefiting from such a fast thermal response, we perform high-performance TG measurements on basic copper carbonate (Cu2(OH)2CO3) and calcium oxalate monohydrate (CaC2O4·H2O). The measured weight losses better agree with the theoretical values with 5–10 times smaller thermal lags at the same heating rate, compared with those measured by using conventional TGA. The MEMS resonant cantilevers hold promise for highly accurate and efficient TG characterization of materials in various fields.

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