“…The SHS targets passed successful tests in various types of installations, namely, dc magnetron systems (MS) [1, 9, 12-14, 15-17, 18-24], high-frequency [25] and pulsed MS [11], MS with additional inductively coupled plasma [26], and arc evaporators [27]. Over the last several years, using the magnetron sputtering of SHS targets, hard coatings were obtained in the systems Ti-Si-N [9,12,28], Ti-B-N [10,13,29,30], Ti-Si-B-N [4,13,29], Ti-Si-C-N [13,29], Ti-Al-C-N [13,29], Ti-C-N [31], Ti-Mo-C-N [31], Ti-Al-B-N [32], Ti-Al-Si-B-N [17,18,30], Ti-Cr-B-N [10,12,14,17,30], Cr-B-N [10,12,33,34], Ti-Zr-C-O-N [19], Ti-Ta-Ca-P-C-O-N [23,24], Ti-Cr-Al-C-N [35,36], etc. Taking into account the increase in demand for various compositions of composite targets, we decided that it is important to present the data on the features of the synthesis of the most interesting and necessary classes of SHS targets differing in regards to their combustion mechanisms and structure formation in the form of the review.…”