Structure and properties of multi-targets magnetron sputtered ZrNbTaTiW multi-elements alloy thin films

Feng, Xingguo; Tang, Guangze; Sun, Min; Ma, Xinxin; Wang, Liqing; Yukimura, Ken

doi:10.1016/j.surfcoat.2012.05.038

Cited by 43 publications

(12 citation statements)

References 16 publications

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“…These are focussed on mechanical properties [4][5][6], structure and morphology [7], electrical properties [8], and magnetic properties [9]. There has been a particular focus on thin films of the HEA CrFeCoNiCu, with [10][11][12][13][14][15] or without a sixth component [16,17].…”

Section: Introductionmentioning

confidence: 99%

Thin films of AlCrFeCoNiCu high-entropy alloy by pulsed laser deposition

Cropper

2018

Applied Surface Science

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Pulsed laser deposition has been used to prepare thin films of the high entropy alloy AlCrFeCoNiCu. The 35 nm films were deposited in ultra-high vacuum onto glass at room temperature and above and analysed using X-ray diffraction and X-ray photoelectron spectroscopy. Films deposited at room temperature exhibit a mix of FCC and BCC reflections, the FCC crystallites having size similar to the film thickness, but the BCC crystallites are larger. The intensity of the reflections from both crystal structures reduce with increasing deposition temperature, the fall in BCC commencing at lower temperature than the FCC associated with a reduction of the content of Al and Cu. X-ray photoelectron spectroscopy shows that the films deposited at room temperature are closer to stoichiometry than those at higher temperatures. An important feature of the X-ray photoelectron spectroscopy depth profiles is surface segregation, the outer 3 nm of the high entropy alloy films has higher concentration of Al and, to a lesser extent, Cr. Highlights • The films exhibit mixed FCC and BCC structure. • With increasing deposition temperature, FCC and BCC reflections reduce associated with loss of Al and Cu. • Surface segregation enriches the surface of the films in Al and to a lesser extent Cr.

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Section: Introductionmentioning

confidence: 99%

Thin films of AlCrFeCoNiCu high-entropy alloy by pulsed laser deposition

Cropper

2018

Applied Surface Science

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“…Atoms of higher sputtering yield are removed preferentially from the bombarded surfaces resulting in surface segregation of one component. However, the reason for this depletion in Zr content in our film was not clear because it was expected that Zr and Nb elements which present similar sputtering yields, heats of sublimation and atomic weights would exhibit very close behaviors during the sputtering process [39,40].…”

Section: Microstructural Propertiesmentioning

confidence: 92%

Investigation of the superelastic behavior of a Ti-16Zr-13Nb-2Sn sputtered film by nanoindentation

Zhou

Fillon

Jabir

et al. 2021

Surface and Coatings Technology

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A new Ti-16Zr-13Nb-2Sn superelastic film incorporating β-stabilizing and highly biocompatible elements was elaborated by magnetron sputtering. The morphological, crystallographic and microstructural characteristics of the obtained films were studied by scanning electron microscopy, atomic force microscopy, X-ray diffraction, and transmission electron microscopy. Superelastic response of the film was investigated at local scale by nanoindentation using both spherical and Berkovich indenters. The sputter-deposited film revealed nanograined β microstructure with preferential growth orientation along [110] direction and excellent superelastic recovery at room temperature. Special attention was paid to the indenter geometry influencing reliable evaluation of the superelastic nature of the film. Evolution of the deformation mechanisms during nanoindentation at increasing depths was rationalized by the calculated representative strain beneath the indenting tips and is discussed in this work.

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“…By avoiding the timeconsuming target preparation step, this approach permits sputtering of HEA thin films in a variety of chemical combinations, The relative surface fraction of each element and the target power on a particular target can be changed to influence stoichiometry. Changing the deposition conditions, however, makes it more difficult to get a desired film composition (Feng et al, 2013;Braic et al, 2013;Lin et al, 2012). iii) Powder targets (as shown in Fig.…”

Section: I)mentioning

confidence: 99%

Sputtering of high entropy alloys thin films: An overview

Oladijo,

Akinlabi,

Mwema

et al. 2024

10.5267/j.esm

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For the past 19 years, high entropy alloys (denoted as HEAs) have piqued the interest of many researchers due to their unique properties. Sputtering High Entropy Alloys on bulk materials, on the other hand, have been widely utilized due to their low cost of manufacture. This paper reviews the most recent trends and advancements in sputtered HEA coatings, thin film research, and development. Firstly, HEA coating and thin films were introduced. Then, a look at sputtering technologies and procedures is presented, followed by a summary of recent research on sputtered HEA thin films, properties, and applications. From reviewed literature, it can be deduced that HEAs that include the full nitride element have greater mechanical and elastic properties, and HEAs generally have the potential for structural, industrial, biomedical, and energy applications. Finally, it is suggested that new stable HEA films and coating research initiatives with various materials be undertaken to widen its applications.

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Structure and properties of multi-targets magnetron sputtered ZrNbTaTiW multi-elements alloy thin films

Cited by 43 publications

References 16 publications

Thin films of AlCrFeCoNiCu high-entropy alloy by pulsed laser deposition

Thin films of AlCrFeCoNiCu high-entropy alloy by pulsed laser deposition

Investigation of the superelastic behavior of a Ti-16Zr-13Nb-2Sn sputtered film by nanoindentation

Sputtering of high entropy alloys thin films: An overview

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