Structure and Properties of Zr-Mo-Si-B-(N) Hard Coatings Obtained by d.c. Magnetron Sputtering of ZrB2-MoSi2 Target

Abstract

Coatings in a Zr-Mo-Si-B-N system were deposited by the magnetron sputtering of ZrB2-MoSi2 targets in argon and nitrogen. The structure of the coatings was investigated using scanning electron microscopy, X-ray diffraction, energy-dispersive spectroscopy, and glow-discharge optical emission spectroscopy. Mechanical and tribological properties were measured using nanoindentation and pin-on-disc testing. Oxidation resistance and oxidation kinetics were estimated via annealing in air at 1000–1500 °C and precision weight measurements. We found that the coatings deposited in Ar demonstrate a superior combination of properties, including hardness of 36 GPa, elastic recovery of 84%, a friction coefficient of 0.6, and oxidation resistance at temperatures up to 1200 °C. High oxidation resistance is realized due to the formation of the protective (SiO2 + ZrO2)/SiO2 oxide layer, which inhibits the diffusion of oxygen into the coating.

Vacancies and substitutional defects in multicomponent diboride Ti0.25Zr0.25Hf0.25Ta0.25B2: first-principle study

“…Calculated mechanical properties of binary diborides and quinary diborides including elastic constants C ij (GPa), bulk modulus B (GPa), shear modulus G (GPa), Young's modulus E (GPa), Poisson's ratio ν, Pugh's ratio G/B, hardness H 1 , H 2 , and H 3 (GPa), and fracture toughness K IC (MPa m 0.5 ). The properties of binary diborides are compared with theoretical papers [46] a , [47] b and [44] e , experimental papers on thin films [48] c , [49] d , [50] f , and [51] g and experimental paper on bulk materials [52] h . The properties of quinary diborides are compared with the arithmetic mean of the properties of the corresponding binary diborides i .…”

Thermal Stability of Oxidation-Resistant Ta-Zr-Si-B-N and Ta-Zr-Si-B-C Coatings under In Situ TEM Heating and Vacuum Annealing

“…The Ta-Zr-Si-B-C and Ta-Zr-Si-B-N coatings were developed based on the high oxidation resistance of Ta-Si-B-C coatings [9] and the positive effect of nitrogen and zirconium on the oxidation resistance and thermal stability of silicide coatings [16][17][18].…”