2005
DOI: 10.1007/s11664-005-0154-x
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Structure and soft magnetic properties of Fe-Co-Ni-based multicomponent thin films

Abstract: Soft magnetic thin films with suitable uniaxial anisotropy and high saturation magnetization are required for high frequency applications, since the ferromagnetic resonance frequency (f FMR ) is proportional to the multiplication of the saturation magnetization and anisotropy magnetic field. In this study, multicomponents of Fe-Co-Ni-based soft magnetic thin films were deposited on the Si substrate by radio frequency (RF) magnetron sputtering with various Ar/N 2 ratios at room temperature. The composition, cry… Show more

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Cited by 8 publications
(4 citation statements)
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“…In brief, magnetic thin films are considered as the potential candidate for thin-film inductors with an aim to improve their M s , H k , ρ, and also compatibility with semiconductor manufacturing processes. Therefore, tremendous efforts have been devoted to developing better magnetic thin films over past decades [3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19].…”
Section: Introductionmentioning
confidence: 99%
“…In brief, magnetic thin films are considered as the potential candidate for thin-film inductors with an aim to improve their M s , H k , ρ, and also compatibility with semiconductor manufacturing processes. Therefore, tremendous efforts have been devoted to developing better magnetic thin films over past decades [3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19].…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, HEA coatings have been proposed for the potential applications as protective films [8][9][10] , wear-resistant materials 11 , corrosion-resistant materials 12 , and coatings in communication devices 13 . That is due to their interesting properties, such as high hardness 14 , strength 15,16 , wear resistance 17,18 , and microstructure stability against heat treatment [19][20][21] .…”
Section: Introductionmentioning
confidence: 99%
“…[15][16][17][18] Moreover, HEA coatings have been proposed for the good application prospect as protective coatings, [19][20][21][22] wear-resistant materials, 23 corrosion-resistant materials, 24 oxidation resistance, 16 slurry erosion resistance 14 and coatings in communication devices. 25 It was found that addition of other element can improve the thermal stability of the coating. 26 In previous investigation, 27,28 we have prepared the nitride and oxide coatings HEA with good mechanical properties.…”
Section: Introductionmentioning
confidence: 99%