2019
DOI: 10.1016/j.apsusc.2019.02.063
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Structure evolution and stress transition in diamond-like carbon films by glancing angle deposition

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Cited by 26 publications
(13 citation statements)
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“…It can be seen that oxygen in the sample can belong to various functional groups. In addition to an identification of oxygen-containing groups from an analysis of the high-resolution C1 s spectra, these spectra could be used to determine the sp 3 / sp 2 ratio because the energy intervals between the C1 s peaks corresponding to the C( sp 2 ) and C( sp 3 ) states are in the range from 0.4 eV [ 56 ] to 0.9 eV [ 67 ]. Therefore, to determine the sp 3 / sp 2 ratio, one should decompose the C1s peak into two or more peaks.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…It can be seen that oxygen in the sample can belong to various functional groups. In addition to an identification of oxygen-containing groups from an analysis of the high-resolution C1 s spectra, these spectra could be used to determine the sp 3 / sp 2 ratio because the energy intervals between the C1 s peaks corresponding to the C( sp 2 ) and C( sp 3 ) states are in the range from 0.4 eV [ 56 ] to 0.9 eV [ 67 ]. Therefore, to determine the sp 3 / sp 2 ratio, one should decompose the C1s peak into two or more peaks.…”
Section: Resultsmentioning
confidence: 99%
“…For example, the intensities of the peaks and the background can be varied, and the positions of the peaks and their half-widths were fixed [ 56 ]. Peaks with bond energies of more than 285.1 eV were attributed to carbon atoms, which bond with oxygen [ 67 ].…”
Section: Resultsmentioning
confidence: 99%
“…For carbon-based film, its mechanical properties would be affected by the sp 3 phase content [35]. For diamond film, its residual stress can be calculated by the formula: σ(GPa)=αΔυ=−0.567(υ − υ 0 ) (cm −1 ), where Δυ is the difference between the measured and natural stress-free diamond peak shifts υ 0 that is taken to be the Raman peak position of the natural diamond when no pressure is applied [36].…”
Section: Resultsmentioning
confidence: 99%
“…DLC coatings have a dense microstructure, chemical inertness, and high mechanical hardness [158]. Due to the structure of DLC coatings, high residual stress is built within these coatings [159]. Consequently, surface adhesion would be weak resulting in the delamination of the coatings at early stages.…”
Section: Dlc Coatingsmentioning
confidence: 99%