Quantitative analyses of the local chemistry of amorphous films at the grain boundary (GB) were taken on hot isostatically pressed high-purity Si 3 N 4 doped with various amounts of calcium (up to 450 ppm). This work was mainly accomplished by using spatially resolved electron energyloss spectroscopy (EELS) in a dedicated scanning transmission electron microscope. The amount of calcium segregation, quantified in terms of GB excess, saturated in the films at a bulk-doping level of ∼220 ppm. Extra additives did not stay at the triple-point glass pockets, where the calcium was almost expelled completely; instead, the additives stayed at intersections between the films and pockets. Otherwise, the calcium distribution was uniform along and across GB films. The latter was determined from simulations of EELS profiling. At grain/pocket interfaces, a much-lower segregation level occurred, ranging from one-half to one-tenth of the level at the GB. This observation indicates different segregation mechanisms in the two cases. Also, the calcium segregation in GB films changed the film composition dramatically, because more N 3− ions were introduced and replaced O 2− ions, to maintain the local stoichiometry. Reduction of the Van der Waals force has been proposed as being the origin of the film expansion with increasing calcium content.