Structure, hardness and thermal stability of TiAlN and nanolayered TiAlN/CrN multilayer films

Barshilia, Harish C.; Prakash, Maya; Jain, Anjana; Rajam, K.S.

doi:10.1016/j.vacuum.2004.08.020

Cited by 195 publications

(81 citation statements)

References 17 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The bilayers of the multilayers can be metals, carbides, nitrides or oxides of different materials or a combination of one layer made of nitride, carbide or oxide of one metal and the second layer made of another metal. A variety of multilayer systems such as TiN/CrN [4,5], TiAlN/CrN [6,7], TiN/NbN [8e11], etc., have been studied extensively. However, there are very few reports on the multilayer coatings based on CrN and CrAlN [12].…”

Section: Introductionmentioning

confidence: 99%

Effect of layer thickness on thermal properties of multilayer thin films produced by PVD

Tlili

Nouveau

Walock

et al. 2012

Vacuum

View full text Add to dashboard Cite

is an open access repository that collects the work of Arts et Métiers ParisTech researchers and makes it freely available over the web where possible. Cr/CrN/CrAlN, CrN/CrAlN and Cr/CrN thin layers were deposited by PVD (Physical Vapor Deposition). The multilayers were obtained from the combined deposition of different layers Cr, CrN and CrAlN thick films on on AISI4140 steel and silicon substrates at 200 C, and evaluated with respect to fundamental properties such as structure and thermal properties. Cr, CrN and CrAlN single layers were also prepared for comparison purposes. The structural and morphological properties of PVD layers were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM) coupled with EDS þ WDS microanalyses, stresses were determined by the Newton's rings methods using the Stoney's equation and surface hardening and hardness profiles were evaluated by micro hardness measurements. The XRD data and HRTEM showed that both the Cr/CrN, CrN/CrAlN and Cr/CrN/CrAlN multilayer coatings exhibited B1NaCl structure with a prominent reflection along (200) plane, and CrAlN sub-layer microstructures composed of nanocrystallites uniformly embedded in an amorphous matrix. The innovation of this work was to use the thickness of three different coating types to determine the thermal properties. Furthermore, an empirical equation was developed for the thermal properties variations with temperature of AISI4140 steel coated with different multilayer coatings. The thermal conductivity of CrAlN single layered was lower than the multilayer and the bulk material AISI4140. Moreover, the influences of structure and composition of the multilayer coatings on the thermal properties are discussed. The thermal conductivity of nanoscale thin film is remarkably lower than that of bulk materials because of its various size effects.

show abstract

Section: Introductionmentioning

confidence: 99%

Effect of layer thickness on thermal properties of multilayer thin films produced by PVD

Tlili

Nouveau

Walock

et al. 2012

Vacuum

View full text Add to dashboard Cite

show abstract

“…In recent years, multilayer coatings have also been developed in an effort to tailor the properties of thin individual layers specifically to the application in mind [11]. For example, the use of CrN and VN based multilayers has led to "super-hard" surface coatings which, whilst very effective at resisting surface abrasion, can also adapt their surface properties under certain tribological conditions to yield desirable friction behaviour [12][13][14].…”

Section: Introductionmentioning

confidence: 99%

High temperature tribological performance of CrAlYN/CrN nanoscale multilayer coatings deposited on γ-TiAl

Walker

Ross

Reinhard

et al. 2009

Wear

View full text Add to dashboard Cite

Nanoscale multilayer nitride coatings deposited by advanced PVD techniques have shown particular promise in improving the tribological properties of a number of modal alloy steels [1]. In this study, we report the effect of temperature on the friction and wear behaviour of a CrAlYN/CrN multilayer coating with a CrAlYON/CrON topcoat deposited on γ-TiAl. Deposition was performed by unbalanced magnetron sputtering following a high power impulse magnetron sputtering (HIPIMS) pre-treatment of the polished substrate. A series of pin-on-disc type experiments, sliding against a polycrystalline alumina counterpart, were carried out at four temperatures: 20ºC, 120ºC, 300ºC and 650ºC. An increase in the average steady-state dynamic friction coefficient was observed between the material couple, from 0.56 at room temperature to 0.65 at 120ºC. However at higher test temperatures of 300ºC and 650ºC a decrease in these values was observed to 0.59 and 0.40, respectively. Scanning electron microscopy and energy dispersive X-ray analysis showed evidence of oxidation at the worn surface of all test temperatures investigated, whilst laser confocal microscopy indicated the formation of an interactive tribo-layer above the plane of the original test surface. Focused ion beam sectioning has been used to prepare site specific samples of the tribo-layers for transmission electron microscopy. The evolution of the wear scar composition and structure and its influence on the reduction in dynamic friction coefficient at elevated temperatures is discussed.

show abstract

“…Alloy nitride coatings have attracted interest because of their high hardness, high thermal stability, and good performance in corrosive environments. [1][2][3][4][5] These coatings can be applied to injection molding components. 6) In particular, injection molding dies must be non-sticking (have a low surface free energy).…”

Section: Introductionmentioning

confidence: 99%

Surface Free Energy of Alloy Nitride Coatings Deposited Using Closed Field Unbalanced Magnetron Sputter Ion Plating

et al. 2006

View full text Add to dashboard Cite

The sticking of product material to injection molding tools is a serious problem, which reduces productivity and reliability. Depositing alloy nitride coatings (TiN, ZrN, CrN, and TiAlCrN) using closed field unbalanced magnetron sputter ion plating and electrodeposition of chromium, and characterizing their surface free energies in the temperature range 20-120 C have led to the development of a non-sticking (with a low surface free energy) coating system for semiconductor IC packaging molding dies. The contact angles of water, diiodomethane and ethylene glycol on the coated surfaces were measured at temperatures in the range 20-120 C using a Dataphysics OCA-20 contact angle analyzer. The surface free energy of the coatings and their components (dispersion and polar) were calculated using the Owens-Wendt geometric mean approach. The surface roughness of these coatings were investigated by atomic force microscopy (AFM). The adhesion force of these coatings were measured using direct tensile pull-off test apparatus. The experimental results revealed that TiAlCrN, CrN and ZrN coatings outperformed Hard-Cr and TiN coatings in terms of anti-adhesion, and thus have the potential as working layers for injection molding industrial equipment, especially in semiconductor IC packaging molding applications.

show abstract

Structure, hardness and thermal stability of TiAlN and nanolayered TiAlN/CrN multilayer films

Cited by 195 publications

References 17 publications

Effect of layer thickness on thermal properties of multilayer thin films produced by PVD

Effect of layer thickness on thermal properties of multilayer thin films produced by PVD

High temperature tribological performance of CrAlYN/CrN nanoscale multilayer coatings deposited on γ-TiAl

Surface Free Energy of Alloy Nitride Coatings Deposited Using Closed Field Unbalanced Magnetron Sputter Ion Plating

Contact Info

Product

Resources

About