2020
DOI: 10.1016/j.ceramint.2020.06.284
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Structure, mechanical and tribological properties, and oxidation resistance of TaC/a-C:H films deposited by high power impulse magnetron sputtering

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Cited by 18 publications
(10 citation statements)
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“…Binding energy scales for NbC were calibrated by setting the C 1s binding energy for the carbidic feature at 282.7 eV. , For TaC, the corresponding C 1s carbide feature was set at 282.9 eV. , The spin–orbit doublet components of Nb 3d core level spectra (3d 5/2 and 3d 3/2 ) were separated by 2.75 eV. , Spectral deconvolution was carried out with a constraint of 3:2 on the 5/2:3/2 peak intensities, , with Nb 3d 7/2 binding energies as described in the literature , though allowed to vary slightly (<0.2 eV) for goodness of fit. A carbide phase C 1s binding energy of 282.9 eV was used to calibrate all the binding energies for TaC films. , The spin orbit doublet (4f 7/2 and 4f 5/2 ) of Ta 4f spectra was separated by 1.9 eV. Spectral deconvolution was set with a constraint of 4:3 on the 7/2:5/2 peak intensities . Shirely background subtraction was applied to remove the background effect. , …”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…Binding energy scales for NbC were calibrated by setting the C 1s binding energy for the carbidic feature at 282.7 eV. , For TaC, the corresponding C 1s carbide feature was set at 282.9 eV. , The spin–orbit doublet components of Nb 3d core level spectra (3d 5/2 and 3d 3/2 ) were separated by 2.75 eV. , Spectral deconvolution was carried out with a constraint of 3:2 on the 5/2:3/2 peak intensities, , with Nb 3d 7/2 binding energies as described in the literature , though allowed to vary slightly (<0.2 eV) for goodness of fit. A carbide phase C 1s binding energy of 282.9 eV was used to calibrate all the binding energies for TaC films. , The spin orbit doublet (4f 7/2 and 4f 5/2 ) of Ta 4f spectra was separated by 1.9 eV. Spectral deconvolution was set with a constraint of 4:3 on the 7/2:5/2 peak intensities . Shirely background subtraction was applied to remove the background effect. , …”
Section: Methodsmentioning
confidence: 99%
“…A carbide phase C 1s binding energy of 282.9 eV was used to calibrate all the binding energies for TaC films. 24,25 The spin orbit doublet (4f 7/2 and 4f 5/2 ) of Ta 4f spectra was separated by 1.9 eV. 30−32 Spectral deconvolution was set with a constraint of 4:3 on the 7/2:5/2 peak intensities.…”
Section: Sample Deposition and Characterization Film Depositionmentioning
confidence: 99%
“…It has to be noted that often such conditions have been marked as dry conditions in literature, while those may be considered simply as unlubricated conditions. Most studies have been performed at ambient temperature and pressure, while few deal with wear studies and friction tests at higher temperature [4][5][6][7][8][9][10][11]16,21,24,30,[38][39][40][41][42][43][44]49,52,[55][56][57]61,[66][67][68][69][70]. The wear mechanisms identified in tests carried out at ambient temperature and in humid air are abrasive wear and tribochemical reactions, resulting in third-body conditions; the constitution and microstructure of the nanocomposite thin films determine the predominant wear and friction scenario (dependent also on the tribosystem in general).…”
Section: Introductionmentioning
confidence: 99%
“…Despite the fact that transition metal nitrides (TMN) such as CrN, TiN and ZrN perform well (Huang et al , 2022; Chang et al , 2022), they have poor adhesion in some conditions. The transition carbonitrides are regarded as promising candidates for combining the benefits and properties of both TMC and TMN, while exhibiting high hardness by varying the N/C atomic ratio, accompanies with completely filling the bonding states between the nonmetal p orbits and the metal d orbital (Luo et al , 2020; Guo et al , 2018). Thus, it is worthwhile to controlling the N/C content within a certain value.…”
Section: Introductionmentioning
confidence: 99%