Structure of Chemical Vapor Deposition Titania/Silica Gel

Лебода, Р.; Gun'ko, V.М.; Marciniak, Magdalena; Малыгин, А. А.; Malkin, A.A; Grzegorczyk, W.; Trznadel, B.J.; Pakhlov, E.M.; Воронин, Е. Ф.

doi:10.1006/jcis.1999.6411

Cited by 60 publications

(44 citation statements)

References 29 publications

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“…Kytö-kivi and Haukka [11] showed, by infrared measurements, that the TiO 2 and ZrO 2 particles are bonded to the silica substrate through Si±O±Ti and Si±O±Zr bonds, respectively. The fact that Si±O±Ti bonds form is supported by the infrared measurements of Leboda et al [17] The presence of MO n/2 particles after MCl n chemisorption indicates that multilayers have formed and deviation from ideal ALD has occurred. While formation of metal oxide particles during the reaction of metal chlorides with oxide substrates may be useful for some applications, the particle formation can ruin the atomic scale conformality and thickness uniformity of films produced by ALD.…”

Section: Introductionmentioning

confidence: 66%

“…Dissociation (Reactions 16,17) or association (Reaction 18) of M(OH) m Cl n±m can also be considered. Dissociation or association are unlikely to play a role in the MO n/2 particle formation, however as it was concluded (Sec.…”

Section: Possible Reaction Mechanismsmentioning

confidence: 99%

“…The hydrogen atom of a i±OH group combines with a chlorine of the TiCl 4 molecule, releasing HCl, while the remaining parts of the TiCl 4 molecule are bonded to the surface, forming a i±O±TiCl 3 species. Ligand exchange reaction has been proposed to occur with one, [7,17,20,34,35] two, [7,17,20,34,35] or maybe even three [2,17±19,34] i±OH groups at the same time. At room temperature, ligand exchange reaction already occurs although not all i±OH groups are consumed through ligand exchange at this temperature.…”

Section: Ligand Exchangementioning

confidence: 99%

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Formation of Metal Oxide Particles in Atomic Layer Deposition During the Chemisorption of Metal Chlorides: A Review

Puurunen

2005

Chemical Vapor Deposition

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As has been known for a decade, metal oxide particles can form in a single reaction of gaseous metal chlorides with solid oxides. This is an undesirable effect in the fabrication of thin films by atomic layer deposition (ALD). This work reviews the experimental results related to the metal oxide particle formation and the mechanisms suggested to account for it. The suggested mechanisms cannot explain the observations, but systematic analysis of the possible reaction paths delivers one reaction mechanism candidate, based on a reaction between surface chlorine groups and the hydroxyl groups of gaseous metal hydroxychloride intermediates. The consequences of the proposed mechanism are discussed.

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Section: Introductionmentioning

confidence: 66%

Section: Possible Reaction Mechanismsmentioning

confidence: 99%

Section: Ligand Exchangementioning

confidence: 99%

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Formation of Metal Oxide Particles in Atomic Layer Deposition During the Chemisorption of Metal Chlorides: A Review

Puurunen

2005

Chemical Vapor Deposition

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“…24 The strong absorption peak at 1089.7 cm -1 is attributed to the Si-O-Si bond symmetric stretching vibration in Figure 4b. In Figure 4c, the peaks at 2973.1, 2925.9, and 2857.3 cm -1 are obviously observed, 25 which are attributed to the -C-H bending stretching vibration and another peak at 1457 cm -1 is indicated to -C-H bending vibration, proving that silica is chemically bonded to the surface of the composite nanoparticles. The thermogravimetric (TG) curves of TZ-10-Y are intuitively demonstrated in Figure 5.…”

Section: Tz-xmentioning

confidence: 92%

Surface Treatment of Broad-Spectrum Ultraviolet Light Shielding Titania/Zinc Oxide Composites and Their Applications in Sunscreens

Li¹,

Yao²,

Zuo³

et al. 2017

Nano Adv

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Nano-titanium oxide (TiO 2 ) and zinc oxide (ZnO) are widely used in sunscreen products, but many shortcomings for these both oxides still exist. In this paper, the hydrolysis of tetraethyl orthosilicate (TEOS) in ethanol solution was used to deposit inorganic silica nano-coating on the surface of TiO 2 /ZnO composite, followed by grafting by organosilane. The as-prepared products were characterized by XRD, FTIR, TG and TEM. In addition, Zeta potential, color difference test, dissolution experiments of zinc ions and water contact angle tests were used to characterize the effect of inorganic silica coating and organosilane grafting. Subsequently, the modified TiO 2 /ZnO composites were applied into the sunscreen formulation and the properties of the as-prepared emulsions were evaluated by the distribution analysis of the particle size, acceleration test and ultraviolet transmittance analyzer. The results showed that the sunscreen emulsion prepared by the TiO 2 /ZnO composite has better sun protection performance and stability than the emulsion prepared by the mixture of TiO 2 and ZnO.

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“…Mesoporous silica gel KSK-2 (Russia) was utilized to prepare titania-silica gel (CVD-TSG) adsorbents by means of the chemical vapor deposition (CVD) technique (16) for TiCl 4 chemisorbed and hydrolyzed at 473 K (K28) and 873 K (K68 , Table 4) using eight cycles of the chemisorption hydrolysis. Carbon-oxide samples were synthesized using pyrolysis of cyclohexene at the silica gel (K03) and CVD-TSG (K282, K682) surfaces at a constant partial pressure 51.3 mm Hg in a flow reactor under isothermal conditions and gravimetric control at 973 K for 5 h (Table 4) (2,17).…”

Section: Introductionmentioning

confidence: 99%