Structure of Cu–N layers synthesized by pulsed magnetron sputtering with variable frequency of plasma generation

Nowakowska-Langier, Katarzyna; Choduń, Rafał; Minikayev, R.; Kurpaska, Ł.; Skowroński, Łukasz; Strzelecki, Grzegorz W.; Okrasa, Sebastian; Zdunek, Krzysztof

doi:10.1016/j.nimb.2017.04.070

Cited by 10 publications

(6 citation statements)

References 21 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The change in the thermal conditions, along with the conditions of the plasma generation, caused the columnar growth. A similar effect was observed during the synthesis of Cu-N layers, when the power was increased [35]. It was observed that electrical conditions of the plasma generation caused differences in the thickness of the coatings.…”

Section: Eds Resultssupporting

confidence: 67%

“…As observed previously [31][32][33][34][35], the pulsed processes on ambient temperature substrates create metastable states from plasma sputtered particles due to rapid heat loss, which effectively freezes atoms and particles on the substrate. The interaction of pulsed plasma with the surface creates an instantaneous and highly energetic thermal effect, which allows heat activation (for adhesion) and a limited short-range diffusion.…”

Section: Xrd Resultsmentioning

confidence: 61%

“…PMS is an efficient and effective technique, which creates alloyed coatings, both classical single-principal ones and new high-entropy ones with multiprincipal element compositions. Though the frequency modulation of plasma causes the formation of varied structures in reactive coatings such as Cu-N or Mo-N [33,35,37], it can also be used to design the structures of HEAs. Therefore, the properties such as hardness can be tailored to meet practical needs.…”

Section: Samplementioning

confidence: 99%

“…Additionally, the figure shows a zoomed-in fragment of the internal 100 kHz excitation frequency. Because of this, there is better control of coating growth [31], and therefore, a wide range of possible structures and properties, such as electrical resistivity [32,33], optical properties and hardness [34], structure [33,35], texture [35,36], and phase composition [37] can be achieved.…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Multi-component low and high entropy metallic coatings synthesized by pulsed magnetron sputtering

Strzelecki

Nowakowska-Langier

Mulewska

et al. 2022

Surface and Coatings Technology

Self Cite

View full text Add to dashboard Cite

Section: Eds Resultssupporting

confidence: 67%

Section: Xrd Resultsmentioning

confidence: 61%

Section: Samplementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Multi-component low and high entropy metallic coatings synthesized by pulsed magnetron sputtering

Strzelecki

Nowakowska-Langier

Mulewska

et al. 2022

Surface and Coatings Technology

Self Cite

View full text Add to dashboard Cite

“…The Tauc plot for the examined films is presented in Figure 10 c. The estimated value of E g is 2.60 ± 0.04 eV (477 ± 7 nm) and 2.00 ± 0.01 eV (620 ± 3 nm) for CuO and Cu 3 N, respectively. The band-gap energy determined for Cu 3 N is comparable to [ 50 , 62 ] or larger [ 61 , 63 ] than the experimental results or theoretical calculations [ 21 , 64 ]. The literature value of the band-gap energy for CuO is in the range off 1.2 to 2.8 eV [ 65 , 66 , 67 , 68 , 69 , 70 , 71 , 72 , 73 ], however, the value obtained in this work is comparable to the values obtained for CuO nanoparticles [ 65 , 66 , 67 , 68 , 69 , 70 , 71 , 72 , 73 , 74 ].…”

Section: Resultsmentioning

confidence: 55%

Copper Nitride Nanowire Arrays—Comparison of Synthetic Approaches

et al. 2021

Self Cite

View full text Add to dashboard Cite

Copper nitride nanowire arrays were synthesized by an ammonolysis reaction of copper oxide precursors grown on copper surfaces in an ammonia solution. The starting Cu films were deposited on a silicon substrate using two different methods: thermal evaporation (30 nm thickness) and electroplating (2 μm thickness). The grown CuO or CuO/Cu(OH)2 architectures were studied in regard to morphology and size, using electron microscopy methods (SEM, TEM). The final shape and composition of the structures were mostly affected by the concentration of the ammonia solution and time of the immersion. Needle-shaped 2–3 μm long nanostructures were formed from the electrodeposited copper films placed in a 0.033 M NH3 solution for 48 h, whereas for the copper films obtained by physical vapor deposition (PVD), well-aligned nano-needles were obtained after 3 h. The phase composition of the films was studied by X-ray diffraction (XRD) and selected area electron diffraction (SAED) analysis, indicating a presence of CuO and Cu(OH)2, as well as Cu residues. Therefore, in order to obtain a pure oxide film, the samples were thermally treated at 120–180 °C, after which the morphology of the structures remained unchanged. In the final stage of this study, Cu3N nanostructures were obtained by an ammonolysis reaction at 310 °C and studied by SEM, TEM, XRD, and spectroscopic methods. The fabricated PVD-derived coatings were also analyzed using a spectroscopic ellipsometry method, in order to calculate dielectric function, band gap and film thickness.

show abstract

Shannon Entropy Characterization of High-Entropy Thin Films Synthesized by Pulsed Magnetron Sputtering: The Influence of Modulation Frequency

Strzelecki,

Nowakowska-Langier,

Namyślak

et al. 2024

Metall Mater Trans A

View full text Add to dashboard Cite

This manuscript presents a comprehensive study of the synthesis of high-entropy TiCrFeCoNi alloy (HEA) thin films via pulsed magnetron sputtering (PMS).The research investigates the impact of various modulation frequencies on the material properties of the synthesized films. By employing Shannon entropy as a novel method to characterize the complexity and homogeneity of high-entropy thin films, we offer new insights into the synthesis process under various thermodynamic conditions. The initial characterization of the alloy, using calculated parameters such as mixing entropy, enthalpy of mixing, and others, sets the stage for a deeper understanding of the alloy's formation and stability. The experimental methodology encompasses target synthesis, sputtering system setup, sample synthesis, and comprehensive process and sample characterization, including EDS analysis, surface and cross-sectional analyses using SEM, and mechanical property assessments via nanoindentation. Results indicate that modulation frequency significantly influences the plasma discharge process, and consequently, the composition, microstructure, and mechanical properties of the HEA films. EDS analysis confirms the successful synthesis of the target alloy composition, and surface and cross-sectional analyses reveal the effects of modulation frequency on film morphology and structure. Mechanical property measurements highlight the variations in hardness and Young’s modulus among the synthesized films. The study elucidates the role of PMS parameters, especially modulation frequency, in controlling the synthesis of high-entropy thin films, paving the way for optimizing film properties for advanced material applications. Graphical Abstract

show abstract

Structure of Cu–N layers synthesized by pulsed magnetron sputtering with variable frequency of plasma generation

Cited by 10 publications

References 21 publications

Multi-component low and high entropy metallic coatings synthesized by pulsed magnetron sputtering

Multi-component low and high entropy metallic coatings synthesized by pulsed magnetron sputtering

Copper Nitride Nanowire Arrays—Comparison of Synthetic Approaches

Shannon Entropy Characterization of High-Entropy Thin Films Synthesized by Pulsed Magnetron Sputtering: The Influence of Modulation Frequency

Contact Info

Product

Resources

About