Structure of Diamond-Like Carbon Film Deposited on Aluminum Oxide Surface with Microstructure

Abstract

We investigated the deposition phenomena of diamond-like carbon (DLC) film on a microstructured Al2O3 surface using an ion-beam technique. In the case of an acceleration voltage of 300 V, the microstructured Al2O3 surface was smoothly coated to have an unevenness of about 200 nm height with DLC film. The hardness of the DLC film indicated maximum values at acceleration voltages of 100–200 V and gradually decreased for acceleration voltages of 300–400 V. By using Raman spectroscopy and Fourier transform infrared spectroscopy, it was shown that the numbers of sp3 bonds in films deposited at acceleration voltages of 100 and 200 V was larger than that of films deposited at acceleration voltages of 300 and 400 V.