MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)
DOI: 10.1109/mhs.1999.820011
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Structure of microrobots using electromagnetic actuators

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Cited by 6 publications
(1 citation statement)
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“…Inchworm motion principle was often used by these robots, in which electromagnetism phenomena was utilized. TORII developed Y-shaped and ¨-shaped microrobots [8], which used three electromagnets and three PZTs, and reached a resolution of less than 1 ȝm in the linear displacement and less than 1 ȝrad in the rotational displacement. Zhu introduced a microrobotbased microassembly system which was composed of small precise mobile stage, flexible microrobots, light microscope, visual feedback system, and control system [9].…”
Section: Introductionmentioning
confidence: 99%
“…Inchworm motion principle was often used by these robots, in which electromagnetism phenomena was utilized. TORII developed Y-shaped and ¨-shaped microrobots [8], which used three electromagnets and three PZTs, and reached a resolution of less than 1 ȝm in the linear displacement and less than 1 ȝrad in the rotational displacement. Zhu introduced a microrobotbased microassembly system which was composed of small precise mobile stage, flexible microrobots, light microscope, visual feedback system, and control system [9].…”
Section: Introductionmentioning
confidence: 99%