Structure of plasma-deposited amorphous hydrogenated boron-carbon thin films

Annen, A.; Saß, M.; Beckmann, R.; Keudell, Achim von; Jacob, W.

doi:10.1016/s0040-6090(97)00735-9

Cited by 32 publications

(14 citation statements)

References 41 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…The effect of boron on the erosion rate was studied in a laboratory experiment in more detail; a-B:C:H films with B/(B+C) ratios between 0 and 1 [26] were eroded in an ECR oxygen discharge at a substrate bias voltage of 60 V. The total erosion rate, as shown in Fig. 5, dropped by almost two orders of magnitude from pure a-C:H to pure a-B:H films.…”

Section: Laboratory A-c:h Versus Tokamak Redepositsmentioning

confidence: 99%

Oxygen glow discharge cleaning in nuclear fusion devices

Hopf

Jacob

Rohde

2008

Journal of Nuclear Materials

Self Cite

View full text Add to dashboard Cite

Laboratory experiments were carried out as part of the preparations of an oxygen glow discharge cleaning experiment in ASDEX Upgrade. They aimed at evaluating the effect of mixing the oxygen with helium, the collateral damage caused by the glow discharge, as well as the influence of impurities in the films being eroded. Oxygen concentrations below 20 % in helium are sufficient to achieve high erosion rates. The discharge can lead to the formation of oxide layers on surfaces which-as demonstrated for tungsten-can be rapidly reduced by post-treatment in a hydrogen discharge. For carbon, aluminum and iron the physical sputtering yield may become similar to the erosion yield of redeposited layers, but it is by more than one order of magnitude smaller for tungsten. Using a-B:C:H films with varying boron content, it was found that impurities can cause the erosion rate to drop by orders of magnitude.

show abstract

Section: Laboratory A-c:h Versus Tokamak Redepositsmentioning

confidence: 99%

Oxygen glow discharge cleaning in nuclear fusion devices

Hopf

Jacob

Rohde

2008

Journal of Nuclear Materials

Self Cite

View full text Add to dashboard Cite

show abstract

“…Under boronization, a coating that consists of an amorphous hydrogenated B-C film (a-B/C:H film) is deposited on the walls of the vacuum vessel and on the surfaces of other in-vessel components. On in-vessel components such as diagnostic windows and mirrors not subjected to strong impact of the plasma, the film grows both as a result of the coating procedure and also owing to the redeposition of the material eroded during discharge [67,68].…”

Section: Introductionmentioning

confidence: 99%

First mirrors for diagnostic systems of an experimental fusion reactor I. Simulation mirror tests under neutron and ion bombardment

Orlinski

Voitsenya

Vukolov

2007

Plasma Devices and Operations

View full text Add to dashboard Cite

2007) First mirrors for diagnostic systems of an experimental fusion reactor I. Simulation mirror tests under neutron and ion bombardment, Plasma Devices and Operations, 15:1, 33-75To link to this article: http://dx.Among the diagnostic systems planned for use in the International Thermonuclear Experimental Reactor to control the reactor operation, a large number of these systems have to use the mirrors to input or output the electromagnetic radiation to or from the burning plasma in different parts of the spectrum. The mirrors placed inside the vacuum vessel will be subjected to the impact of several factors, resulting in degradation in their optical characteristics. The most critical factors are erosion under the bombardment with a flux of high-energy particles, deuterons and tritons, and the deposition of the products of erosion of the in-vessel components. The first part of this review presents the results of the simulation experiments studying the effect of sputtering and deposition of contaminants on the optical properties of mirrors fabricated from different materials. In the second part of the review, the results of mirror testing on the operating large-scale fusion devices are considered.

show abstract

“…3 Another absorption peak at around 1600 cm Ϫ1 reflects the HFCvCϽvibrating band. 17,18 None of the IR spectra showed vibration modes for C or B and H atoms in CH, CH 2 , CH 3 , and BH configurations, 2,19 implying that the FB-DLC films contain no detectable CuH and BuH bonding. %.…”

Section: Resultsmentioning

confidence: 98%

“…No crystal or grain boundary features could be observed in the films under both scanning electron microscopy and transmission electron microscopy examination. 3 For B-doped carbon films, Shirai et al 17 and Annen et al 18 identified that the absorption band for a CuB stretch vibration was in a wave-number range of 1050-1200 cm Ϫ1 and moved to high wave number in the IR spectra with increasing C content, above 70 at. Figure 2 depicts the normalized IR spectra from the FB-DLC films whose chemical compositions are presented in Table I.…”

Section: Resultsmentioning

confidence: 99%

Fluorine and boron co-doped diamond-like carbon films deposited by pulsed glow discharge plasma immersion ion processing

Hakovirta

Peters

et al. 2002

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

View full text Add to dashboard Cite

Structural, optical, and electrical properties of doped hydrogenated diamond-like amorphous carbon films deposited using the dc saddle-field glow-discharge technique Fluorine ͑F͒ and boron ͑B͒ co-doped diamond-like carbon ͑FB-DLC͒ films were prepared on different substrates by the plasma immersion ion processing ͑PIIP͒ technique. A pulse glow discharge plasma was used for the PIIP deposition and was produced at a pressure of 1.33 Pa from acetylene (C 2 H 2 ), diborane (B 2 H 6 ), and hexafluoroethane (C 2 F 6 ) gas. Films of FB-DLC were deposited with different chemical compositions by varying the flow ratios of the C 2 H 2 , B 2 H 6 , and C 2 F 6 source gases. The incorporation of B 2 H 6 and C 2 F 6 into PIIP deposited DLC resulted in the formation of FuC and BuC hybridized bonding structures. The levels of the F and B concentrations effected the chemical bonding and the physical properties as was evident from the changes observed in density, hardness, stress, friction coefficient, and contact angle of water on films. Compared to B-doped or F-doped DLC films, the F and B co-doping of DLC during PIIP deposition resulted in the formation of films that possessed a reduced hydrogen concentration and stress, while maintaining a high hardness, low friction coefficient, and high wetting contact angle.

show abstract

Structure of plasma-deposited amorphous hydrogenated boron-carbon thin films

Cited by 32 publications

References 41 publications

Oxygen glow discharge cleaning in nuclear fusion devices

Oxygen glow discharge cleaning in nuclear fusion devices

First mirrors for diagnostic systems of an experimental fusion reactor I. Simulation mirror tests under neutron and ion bombardment

Fluorine and boron co-doped diamond-like carbon films deposited by pulsed glow discharge plasma immersion ion processing

Contact Info

Product

Resources

About