Network
size control was evaluated for microporous membranes derived
from triethoxysilane (TRIES) that contains highly reactive Si–H
groups. It was possible to control the concentration of the Si–H
groups via the conditions of calcination (temperature, atmosphere).
Si–H groups remained within their network structure when the
TRIES membrane was calcined at 350 °C under a N2 atmosphere,
and had a loose network structure (H2 permeance: 5.40 ×
10–7 mol m–2 s–1 Pa–1, H2/CH4 selectivity:
36). When calcination at high temperatures converted the Si–H
groups to Si–O–Si groups, the TRIES membrane showed
a high level of separation performance (H2 permeance: 2.34
× 10–7 mol m–2 s–1 Pa–1, H2/CH4 selectivity:
590) due to a densification of the network structure. Compared with
conventional microporous silica membranes, a TRIES membrane with Si–H
groups showed hydrophobic properties, but water vapor was adsorbed
and/or capillary-condensed in the microporous structure, and permeation
blocking for He molecules was observed at temperatures below 150 °C
in the presence of saturated water vapor at 25 °C. Hydrophobic
Si–H groups improved the hydrothermal stability at 300 °C,
but depending on the partial pressure of the steam, the reaction between
Si–H groups and water vapor degraded the hydrothermal stability
of the TRIES membranes.