2016
DOI: 10.1002/sia.6130
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Studies of Cu-doped ZnS thin films prepared by sputtering technique

Abstract: Radio frequency magnetron sputtering technique has been used to deposit Cu‐doped ZnS thin films on glass and n‐type Si(100) substrates at room temperature. Crystalline structure, surface morphology, and elemental oxidation states have been studied by X‐ray diffraction, field emission scanning electron microscopy, atomic force microscopy, and X‐ray photoelectron spectroscopy. Ultraviolet–visible spectroscopy has been employed to measure the transmittance, reflectance, and absorbance properties of coated films. … Show more

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Cited by 23 publications
(3 citation statements)
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“…However, the intensity of the peaks was found to be gradually decreasing with an increase in deposition temperature, which indicates a progressive transformation of the CZS oriented polycrystalline phase to a distinct ZnS phase. This shows a separation from the deposited CZS thin films to ZnS with increasing deposition temperature [16][17][18][19][20]. Increasing the deposition temperature from 400 to 430 ᴼC reveals that the deposited material suddenly changes to polycrystalline ZnO (JCPDS 36-1451) with different peaks orientation.…”
Section: Structural Analysismentioning
confidence: 99%
“…However, the intensity of the peaks was found to be gradually decreasing with an increase in deposition temperature, which indicates a progressive transformation of the CZS oriented polycrystalline phase to a distinct ZnS phase. This shows a separation from the deposited CZS thin films to ZnS with increasing deposition temperature [16][17][18][19][20]. Increasing the deposition temperature from 400 to 430 ᴼC reveals that the deposited material suddenly changes to polycrystalline ZnO (JCPDS 36-1451) with different peaks orientation.…”
Section: Structural Analysismentioning
confidence: 99%
“…Within a certain range of doping concentration, the similar trend has been reported in Refs. [26,27]. This kind of relatively flat surface of the deposited films will not cause too much scattering loss.…”
Section: Elemental Composition and Afm Resultsmentioning
confidence: 97%
“…[10]. To make ZnS thin films, microwave-assisted [11], hydrothermal [12], MBE, PLD [13,14] CBD [15], sputtering [16], and CSP [17][18][19][20] have all been used. CSP has received a lot of attention as a technology because of its capacity to deposit over a large region, low cost, and ambient operating environment.…”
Section: Introductionmentioning
confidence: 99%