1971
DOI: 10.1088/0022-3727/4/10/319
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Studies of tunnel MOS diodes I. Interface effects in silicon Schottky diodes

Abstract: A theoretical and experimental study has been made of silicon Schottky diodes in which the metal and semiconductor are separated by a thin interfacial film. A generalized approach is taken towards the interface states which considers their communication with both the metal and the semiconductor. Diodes were fabricated with interfacial films ranging from 8 to 26 Å in thickness, and their characteristics are related to this model. The effects of reduced transmission coefficients together with fixed charge in the… Show more

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Cited by 1,697 publications
(913 citation statements)
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“…SBH(J 0 ) > SBH(C 0 ) can be due to tunneling-attenuated TE (see Table 2), with the difference due to the monolayer-induced reduction in transmission probability. [44,63,90,150] SBH(J 0 ) < SBH(C 0 ) suggests an inhomogeneous barrier. [151,152] Surprisingly, for Hg/alkyl-n-Si MOMS SBH(J 0 ) $SBH(C 0 )) [19,135] but this is simply because both the width of the space charge (C 0 ) and the semiconductor transport (J 0 ) saturate at similar values (strong inversion).…”
Section: Extraction Of the ''Semiconductor Barrier Height'' (Sbh)mentioning
confidence: 98%
“…SBH(J 0 ) > SBH(C 0 ) can be due to tunneling-attenuated TE (see Table 2), with the difference due to the monolayer-induced reduction in transmission probability. [44,63,90,150] SBH(J 0 ) < SBH(C 0 ) suggests an inhomogeneous barrier. [151,152] Surprisingly, for Hg/alkyl-n-Si MOMS SBH(J 0 ) $SBH(C 0 )) [19,135] but this is simply because both the width of the space charge (C 0 ) and the semiconductor transport (J 0 ) saturate at similar values (strong inversion).…”
Section: Extraction Of the ''Semiconductor Barrier Height'' (Sbh)mentioning
confidence: 98%
“…[15,27,28] Q sc is the total space charge in silicon (see Figure S3, Supporting Information). [15] As shown in Figure 4d, the interface state based ideality factor is less than that based on the I-V curves because the extracted ideality factor based on the only interface states does not include the other possible contributions.…”
Section: Wwwadvelectronicmatdementioning
confidence: 99%
“…Hence, as a result of a distribution of interface states in space and in energy, one may consider that a fraction (D SA ) is in equilibrium with the metal and a fraction (D SB ) is in equilibrium with the semiconductor. 37 Equation (2) gives …”
Section: A Band Diagram Of the Tunnel Mis Diodementioning
confidence: 99%