Without a post-annealing procedure, the β-FeSi 2 thin films are epitaxially grown on Si(111) wafer substrates via facing-targets direct-current sputtering. During epitaxial growth, the temperature for heating of substrates is maintained at 600 C. The resultant p-type Si/n-type β-FeSi 2 heterojunctions are produced. At room temperature, a large leakage current under an applied reverse bias voltage together with a small photo-detective performance is observed from the measured dark and irradiated current density-voltage curves of the created heterojunctions. Both of the conductance-voltage (G/ ω-V) and capacitance-voltage (C-V) measurements at different frequencies (f ) in the range of 5 kHz-1 MHz are performed in the dark at room temperature. The interface state density (N ss ) and series resistance (R s ) in the created p-type Si/n-type β-FeSi 2 heterojunctions are computed and analyzed from the measured C-V-f and G/ω-V-f curves. N ss is found to be 3.48 Â 10 12 eV À1 cm À2 at 5 kHz and decreased to 4.68 Â 10 11 eV À1 cm À2 at 1 MHz. Moreover, the values of R s at zero bias are 2.21 kΩ at 5 kHz and 13.66 Ω at 1 MHz. These results review the presence of N ss and R s in the created heterojunctions, and they can be the cause to degrade the heterojunction performance.