“…One of the most widespread applications of SHG has been the monitoring of adatom interactions with semiconductor surfaces, which underlie such key technological processes as epitaxial film growth and etching. For example, singlewavelength SHG has been used to monitor adsorption and desorption 43,54,141 -143 and surface diffusion 144 -147 of H, 54,55,143,148,149 Ge, 150 -152 B, 58 O, 43 Sb, 145,153 In, 146 Ga, 154 Cl 2 and XeF 2 155 on various semiconductor surfaces. Adsorbate effects on spectroscopic SHG have been reported for a few semiconductor surfaces, including H, 54 C 10 H 21 134 :Si(111) and H, 53 -55 Ge, 133 B, 58 Sb, 153 As 128 : Si(001).…”