2011
DOI: 10.1016/j.sna.2010.04.006
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Studies on low-temperature direct bonding of VUV, VUV/O3 and O2 plasma pretreated cyclo-olefin polymer

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Cited by 71 publications
(67 citation statements)
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“…13 In particular, the VUV/O 3 treatment is known to result in the formation of polar functional groups in organic polymer films. 14 Hence, this treatment would increase the hydrophilicity and specific surface area of carbon materials.…”
Section: © 2013 Author(s) All Article Content Except Where Otherwismentioning
confidence: 99%
“…13 In particular, the VUV/O 3 treatment is known to result in the formation of polar functional groups in organic polymer films. 14 Hence, this treatment would increase the hydrophilicity and specific surface area of carbon materials.…”
Section: © 2013 Author(s) All Article Content Except Where Otherwismentioning
confidence: 99%
“…Many different techniques have been reported for polymer treatments with plasma; ion implantation is frequently used [6][7][8][9][10], although other techniques have been studied as well, e.g., discharge barriers [11][12][13] or microwave electron cyclotron equipments [14][15][16][17]. Several types of gases have been employed, which can be divided into three groups: non-reactive, like Ar [7,16,18,19] or He [20][21][22]; reactive, like H 2 [22], N 2 [6,10,23,24], O 2 [8,13,17,23], or air [25][26][27]; and precursor gases, which led to the deposition of thin layers on the substrate [20,[28][29][30].…”
Section: Introductionmentioning
confidence: 99%
“…Several types of gases have been employed, which can be divided into three groups: non-reactive, like Ar [7,16,18,19] or He [20][21][22]; reactive, like H 2 [22], N 2 [6,10,23,24], O 2 [8,13,17,23], or air [25][26][27]; and precursor gases, which led to the deposition of thin layers on the substrate [20,[28][29][30]. In general, the treatments caused a variation of the crosslinking of the substrate [7,15,17,19,28] and/or modification of the surface species [7,12,13,23]. As a result, an improvement of the mechanical, frictional, and wearing properties is observed [6,9,22,29,31], although not always together [6,8,19,21].…”
Section: Introductionmentioning
confidence: 99%
“…14, 16,17 APTES was formed on the COP surface pretreated by UV irradiation for 30 s. The APTES formation process was carried out on the UV-irradiation-treated COP surface, and the water contact angle was then investigated. The water contact angles of 0, 10, 20, or 25 s UV-irradiation-treated COP surfaces were not distinctly different after the APTES formation process [ Fig.…”
Section: Aptes Formation On Uv-irradiation-treated Cop Surfacementioning
confidence: 99%
“…15 Moreover, the surface properties (e.g., roughness, functional groups) of COP are controllable by UV irradiation treatment. 16,17 The process, however, regarding the metallic mold fabrication by replication of a nanopatterned COP master mold has not been systematically studied yet.…”
Section: Introductionmentioning
confidence: 99%