2005
DOI: 10.1016/j.tsf.2004.09.022
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Studies on micro-structural and electrical properties of spray-deposited fluorine-doped tin oxide thin films from low-cost precursor

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Cited by 166 publications
(110 citation statements)
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“…The optimum deposition rate of 27 nm·min −1 was achieved through a trial of different pulsing frequency, duty cycle and target to substrate distance, using the SnO2 powder target. The achieved deposition rate is higher than that reported in other deposition techniques such as spray pyrolosis [11]. The deposition rate for the different powder targets was found not vary during this study.…”
Section: Methodscontrasting
confidence: 54%
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“…The optimum deposition rate of 27 nm·min −1 was achieved through a trial of different pulsing frequency, duty cycle and target to substrate distance, using the SnO2 powder target. The achieved deposition rate is higher than that reported in other deposition techniques such as spray pyrolosis [11]. The deposition rate for the different powder targets was found not vary during this study.…”
Section: Methodscontrasting
confidence: 54%
“…A preferred orientation can also be affected by experimental parameters, such as the growth temperature [29,30], coating thickness [31] and fluorine doping level [9,11].…”
Section: Structural Propertiesmentioning
confidence: 99%
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