The distribution of Si, Fe, and Cu in FeSi 2 alloys, with or without the addition of Cu, were studied by electron probe microanalysis (EPMA). Alloys were prepared by slow solidification from the melt. Without Cu addition, both e-and a-phases were clearly observed, and a b-phase surrounding the e-phase was additionally observed after in situ annealing at 950°C for 12 h. With inclusion of 0.5 at.% Cu, the eutectoid reaction (a fi b + Si) was enhanced greatly. Only 0.01 at.% Cu was dissolved into the e-phase, with the excess Cu atoms being largely found at the outer edge of the e-phase. Ex situ annealing at 950°C for 12 h greatly changed the distribution of Si, Fe, and Cu. The e-phase changed its Si/Fe atomic ratio from 1.470 to 1.907, indicating an early stage of the peritectoid reaction (e + a fi b) and/or the subsequent reaction (e + Si fi b), with an increase in the Cu content up to 0.04 at.%. The size of this new phase was smaller than the original e-phase, and this new phase was surrounded by a shell of Si/Fe with an atomic ratio of 0.727 to 1.788 and a Cu content of 0.01 at.% to 0.11 at.%. In situ annealing under the same condition yielded different results: a large amount of Si segregates from the a-phase matrix, leaving a Si/Fe atomic ratio of only 0.506 to 0.530. The peritectoid reaction of the e-phase was found to depend on the Cu content. For the e-phase with undetectable levels of Cu, the Si/Fe atomic ratio remained at 0.954 to 0.998, but this ratio decreased with increasing Cu content to 0.55 at 2.20 at.% Cu. A plot of at.% Cu versus Si/Fe atomic ratio revealed a local minimum at the e-phase and expectedly at both the b-and a-phases. Nonstoichiometric structures (neither a-, b-nor e-phases) seemed to have higher at.% Cu compared with those with the closest Si/Fe composition.