“…1 Compared with other analytical techniques suitable for microanalysis with similar figures of merit, e.g., glow dischargeoptical emission-mass spectrometry, secondary ion/neutral mass spectrometry, electron probe microanalysis, laser induced plasma emission spectrometry, particle-induced X-ray emission, and Auger-spectroscopy, LA-ICP-MS has numerous advantages, e.g., non-vacuum conditions, fastness, few restrictions concerning sample geometry, and a wide range of measurable concentrations. The ability to analyse both major and trace elements within a small area of the sample (10 2 -10 5 mm 2 ) as well as across large patterns (within cm range) is very important for the variety of applications of LA-ICP-MS in materials science, [1][2][3][4][5][6] mineralogy and geochemistry, [7][8][9][10][11][12] archaeology, 10,14 and biology. 15 Movable beam position regarding the sample surface allows to profile the lateral distribution of elements across the sample area.…”