2008
DOI: 10.1016/j.apsusc.2007.10.074
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Study and applications of plasma-modified Si and porous Si surfaces

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Cited by 6 publications
(3 citation statements)
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“…8, shows that, for different temperatures the introduction of CO 2 gas at 500 ppm pressure induce a change in the capacitance-voltage values [23]. One can observe that the sensor behaves as a metal insulator semiconductor (MIS) structure as observed by several authors [9,11]. For the Al/CH x /PS/p-Si/Al structure biased negatively, the capacitance decreases with bias voltage reaches a maximum at about -1volt then stabilizes.…”
Section: Capacitance Measurementsmentioning
confidence: 62%
See 1 more Smart Citation
“…8, shows that, for different temperatures the introduction of CO 2 gas at 500 ppm pressure induce a change in the capacitance-voltage values [23]. One can observe that the sensor behaves as a metal insulator semiconductor (MIS) structure as observed by several authors [9,11]. For the Al/CH x /PS/p-Si/Al structure biased negatively, the capacitance decreases with bias voltage reaches a maximum at about -1volt then stabilizes.…”
Section: Capacitance Measurementsmentioning
confidence: 62%
“…Some definitions are established from previous studies. First, the rectifying behavior increases with the porosity while the sensitivity decreases [9]. Second, the sensitivity of a structure to different vapors is usually evaluated by the ratio ∆I / I 0= (I gas -I 0 )/ I 0, where I gas and I 0 are the current intensity in the presence and absence of gas, respectively [10].…”
Section: Introductionmentioning
confidence: 99%
“…This termination offers good electronic properties but suffers from instability [34]. In fact, silicon-hydrogen bonds are unstable when exposed to ambient air and slowly oxidize to form a monolayer of oxide, which many attempts have been made in order to find a better method for PL stabilization [35]. Fig.…”
Section: Pl Characteristics Of the Psi Modified By Zinc Oxidementioning
confidence: 99%