Study of (100) orientated ZnO films by APCVD system

Pacio, M.; Juárez, H.; Escalante, G.; García, Gregorio Gómez-Jarabo; Díaz, T.; Rosendo, E.

doi:10.1016/j.mseb.2010.04.030

Cited by 11 publications

(7 citation statements)

References 25 publications

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“…ZnO films manufactured by APCVD with a zinc source such as zinc acetylacetonate (Zn(C 5 H 7 O 2 ) 2 ) or zinc acetate are chemically stable in air atmospheric pressure and are used as a precursor instead of diethyl zinc and dimethyl zinc 29 . Atmospheric CVD is advanced by the production of active precursor vapors via gas-phase reactions.…”

Section: Introductionmentioning

confidence: 99%

Resistivity Reduction of Nanostructured Undoped Zinc Oxide thin Films for Ag/ZnO Bilayers Using APCVD and Sputtering Techniques

Najafi

Rozati

2018

Mat. Res.

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Nanostructured undoped zinc oxide (ZnO) thin films were deposited using atmospheric pressure chemical vapor deposition (APCVD) on glass substrates using zinc acetate dehydrate [C 4 H 6 O 4 Zn·2H 2 O, ZnAc] in less than 2 minutes for each sample. In order to reduce the resistivity of ZnO films, a very thin layer of Ag was deposited on top of the films via the sputtering method to reduce resistivity from 2.89 to 0.31 Ω.cm, using only a 30Å silver coating. Structural, electrical and optical properties of the resulting bilayers were also investigated. The results show a polycrystalline structure in higher temperatures compared to rather amorphous ones in lower temperatures such as 325℃. The XRD patterns of the optimum polycrystalline films were identified as a hexagonal wurtzite structure of ZnO with the (002) preferred orientation. Also, sheet resistance decreased from 17.8 MΩ/⧠ to 28.9 KΩ/⧠ for the temperatures of 325℃ to 450℃, respectively. Based on the physical properties of undoped ZnO, substrate temperature is an important factor which affects the crystallite size and modifies electrical parameters. UV-vis measurements revealed a reduction in the transparency of the layers with increasing substrate temperature. A sharp cut-off was observed in ultraviolet regions at around 380 nm.

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Section: Introductionmentioning

confidence: 99%

Resistivity Reduction of Nanostructured Undoped Zinc Oxide thin Films for Ag/ZnO Bilayers Using APCVD and Sputtering Techniques

Najafi

Rozati

2018

Mat. Res.

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“…Atmospheric pressure CVD (APCVD) is the most basic method of chemical vapour deposition, simply heating precursors to roughly half of its boiling point so that a vapour is evolved, then pushing the vapour to a heated reactor where it decomposes, depositing a film onto a substrate. 3 This method is commonly employed to deposit functional metal oxide thin films from simple molecular precursors, including TiO2, [4][5][6] VO2(M), [7][8][9] SnO2, [10][11][12] Fe2O3, 13 WO3, 14,15 ZnO, [16][17][18] α-Al2O3, 19,20 as well as many others. 21 Despite widespread use in the deposition of metal oxide coatings, little is known about reactions that occur within the gas phase during the deposition of the thin film.…”

Section: Introductionmentioning

confidence: 99%

In situ mass spectrometry analysis of chemical vapour deposition of TiO₂thin films to study gas phase mechanisms

et al. 2016

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“…(13) (100) ZnO films can be deposited by different methods. (14)(15)(16)(17)(18) Bulk acoustic wave properties of (100) ZnO films have been reported, (19) but their SAW properties were seldom studied. In our previous research, (20) for the first time, (100) ZnO films were combined with diamond to form new highfrequency SAW substrates.…”

Section: Introductionmentioning

confidence: 99%

High-electromechanical-coupling-coefficient and High-velocity Surface Acoustic Wave Materials of ZnO Films on Diamond

Tasi¹,

Wu²

2019

Sensors and Materials

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Functional coatings are effective for improving the properties of devices. The development of thin-film-based surface acoustic wave (SAW) devices coated with piezoelectric zinc oxide (ZnO) thin films has attracted considerable attention. The orientation and thickness of piezoelectric films will affect the characteristics of SAW devices. In this research, (100) ZnO films were combined with diamond to form new composite SAW substrates. The SAW properties of (100) ZnO films on diamond with four composite structures, namely, interdigital transducer (IDT)/(100)ZnO/diamond, (100)ZnO/IDT/diamond, IDT/(100)ZnO/metal/diamond, and metal/ (100)ZnO/IDT/diamond were systematically analyzed and some excellent SAW properties were observed. In particular, for mode 1 of (100)ZnO/IDT/diamond, a maximum K 2 of 5.85% and a maximum velocity of 8857 m/s were obtained at a minimum film thickness ratio of h/λ = 0.11. Such research results provide a predictable theoretical basis for the further application of such substrates in high-velocity SAW devices.

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Study of (100) orientated ZnO films by APCVD system

Cited by 11 publications

References 25 publications

Resistivity Reduction of Nanostructured Undoped Zinc Oxide thin Films for Ag/ZnO Bilayers Using APCVD and Sputtering Techniques

Resistivity Reduction of Nanostructured Undoped Zinc Oxide thin Films for Ag/ZnO Bilayers Using APCVD and Sputtering Techniques

In situ mass spectrometry analysis of chemical vapour deposition of TiO₂thin films to study gas phase mechanisms

High-electromechanical-coupling-coefficient and High-velocity Surface Acoustic Wave Materials of ZnO Films on Diamond

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Study of (100) orientated ZnO films by APCVD system

Cited by 11 publications

References 25 publications

Resistivity Reduction of Nanostructured Undoped Zinc Oxide thin Films for Ag/ZnO Bilayers Using APCVD and Sputtering Techniques

Resistivity Reduction of Nanostructured Undoped Zinc Oxide thin Films for Ag/ZnO Bilayers Using APCVD and Sputtering Techniques

In situ mass spectrometry analysis of chemical vapour deposition of TiO2thin films to study gas phase mechanisms

High-electromechanical-coupling-coefficient and High-velocity Surface Acoustic Wave Materials of ZnO Films on Diamond

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In situ mass spectrometry analysis of chemical vapour deposition of TiO₂thin films to study gas phase mechanisms