Study of a high-precision displacement sensor based on a configured moving light field with uniform scanning

Abstract

A new measuring method for uniform scanning is proposed in this paper. This method uses a moving light field to establish the relationship between displacement and time, and the displacement is measured by the time difference of the traveling wave signal. The high-precision moving light field is configured by the time and spatial orthogonal modulation of the light intensity. Experiments verified the feasibility of the proposed sensor, and the primary measurement error components were summarized. Combined with the experimental results and the mathematical model, the error rule of the uniformity of the moving light field was analyzed in detail, and the optimization scheme of a differential structure was proposed. Finally, a differential structure sensor was fabricated with a pitch of 0.6 mm in the range of 120 mm. After optimizing the design and the error correction, the measurement accuracy reached ±0.4 µm with a 1 nm resolution within the range of 120 mm, and the results demonstrated that high-precision measurement was achieved using sub-millimeter periods.

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