Study of a micro-roughness probe with ultrasonic sensor

Hidaka, Kazuhiko; Saito, Akinori; Koga, Satoshi

doi:10.1016/j.cirp.2008.03.129

Cited by 24 publications

(9 citation statements)

References 3 publications

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“…However, it is very difficult to precisely measure the shapes of micro-holes that have large length/diameter (L/D) ratios because of the difficulties encountered during probe fabrication and the complexities involved in employing a sensing method that uses a small measuring force. Many studies have been reported on micro-hole measurement techniques employing a variety of probes such as optical probes [1][2][3], vibroscanning probes [4,5], vibrating probes [6][7][8][9][10][11][12], tunneling effect probes [12,13], opto-tactile probes [14], fiber probes [15,16], optical trapping probes [17], and diaphragm or flexure based probes using an elastic mechanism [18][19][20][21][22][23][24][25][26][27].…”

Section: Introductionmentioning

confidence: 99%

Development of Touch Probing System Using a Fiber Stylus

Murakami

Katsuki

Sajima

2016

Fibers

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This paper presents a system that can be used for micro-hole measurement; the system comprises an optical fiber stylus that is 5 µm in diameter. The stylus deflects when it comes into contact with the measured surface; this deflection is measured optically. In this study, the design parameters of the optical system are determined using a ray-tracing method, and a prototype of the probing system is fabricated to verify ray-tracing simulation results; furthermore, the performance of the system is evaluated experimentally. The results show that the design parameters of this system can be determined using ray-tracing; the resolution of the measurement system using this shaft was approximately 3 nm, and the practicality of this system was confirmed by measuring the shape of a micro-hole 100 µm in diameter and 475 µm in depth.

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Section: Introductionmentioning

confidence: 99%

Development of Touch Probing System Using a Fiber Stylus

Murakami

Katsuki

Sajima

2016

Fibers

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“…One can say that, the minimum conditions for wringability (the ability of two surfaces to adhere tightly to each other in the absence of external means) are a surface finish of 0.025 m or better and flatness of at least 0.13 m [7,8]. Recently, some published works interested in studying the surface profile of GB ends using AFM compared to reference flat mirror to verify standard/reference measurement accuracy [9][10][11]. However, the advanced technology that is employed in end standard surface mapping may require some additional investigations in order to guarantee the nanometric level of measurement accuracy.…”

Section: Introductionmentioning

confidence: 99%

Uncertainty Estimation due to Geometrical Imperfection and Wringing in Calibration of End Standards

Ali

Naeim

2013

ISRN Optics

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Uncertainty in gauge block measurement depends on three major areas, thermal effects, dimension metrology system that includes measurement strategy, and end standard surface perfection grades. In this paper, we focus precisely on estimating the uncertainty due to the geometrical imperfection of measuring surfaces and wringing gab in calibration of end standards grade 0. Optomechanical system equipped with Zygo measurement interferometer (ZMI-1000A) and AFM technique have been employed. A novel protocol of measurement covering the geometric form of end standard surfaces and wrung base platen was experimentally applied. Surface imperfection characteristics of commonly used 6.5 mm GB have been achieved by AFM in 2D and 3D to be applied in three sets of experiments. The results show that there are obvious mapping relations between the geometrical imperfection and wringing thickness of the end standards calibration. Moreover, the predicted uncertainties are clearly estimated within an acceptable range from 0.132 µm, 0.164 µm and 0.202 µm, respectively. Experimental and analytical results are also presented.

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“…Previous studies on microhole measurements for through-holes have reported optical methods involving the detection of reflected light at the hole outlet by shining light on the inner wall, (1) laser-optical internal thread measurement, (2) and those involving the triangulation method. (3) Furthermore, other reported methods on blind hole measurements have included those involving a probe using the vibroscanning method, (4,5) those based on an amplitude fluctuation due to the contact of a vibrating probe, (6)(7)(8)(9) the detection of the closeness of a probe and the surface of a measured object using the tunnel phenomenon, (10,11) measurement of reflected light with a CCD image sensor by irradiating a laser beam on the ball tip of a probe, (12,13) and measurement of probe distortion with a CCD image sensor. (14) In addition, other reported blind hole measurement studies have involved techniques such as laser trapping contact elements using an optical fiber, (15) the detection of the retention and contact of a contact element with air pressure, (16) and the measurment of a diaphragm fixed on a probe with a displacement sensor.…”

Section: Introductionmentioning

confidence: 99%

Precision Profile Measurement System for Microholes Using Vibrating Optical Fiber

Sajima

Murakami

Katsuki

et al. 2012

Sensors and Materials

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In this study, we have proposed and implemented a profile measurement system for microholes using an optical fiber probe equipped with a vibrating mechanism driven by a piezoelectric element. The optical fiber probe consists of a stylus shaft of 3 µm diameter and a glass ball of 5 µm diameter attached to the tip. The principle involves the monitoring of the stylus shaft displacement by detecting a change in the amount of light received by two dual-element photodiodes. These diodes are set up facing laser beams that are irradiated onto the shaft portion from the X and Y directions. In this study, a tube-type piezoelectric element was set at the base of the stylus allowing it to vibrate in the X and Y directions. Firstly, we examined the displacement detection characteristics and frequency response characteristics of the probe. Secondly, the performance of the vibrating mechanism was examined. Finally, the measurement performance of the fiber probe was experimentally examined by measuring a hole of 150 µm diameter. The stylus could be operated in a circular path of 9.69 µm diameter. The changes in amplitude and phase of vibration of the stylus allowed for contact detection with the hole wall. Our study has potential applications for measurements of microholes in the diameter range of 10-150 µm.

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Study of a micro-roughness probe with ultrasonic sensor

Cited by 24 publications

References 3 publications

Development of Touch Probing System Using a Fiber Stylus

Development of Touch Probing System Using a Fiber Stylus

Uncertainty Estimation due to Geometrical Imperfection and Wringing in Calibration of End Standards

Precision Profile Measurement System for Microholes Using Vibrating Optical Fiber

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