2006
DOI: 10.1143/jjap.45.4780
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Study of a Mini-Ultrasonic Motor with Square Metal Bar and Piezoelectric Plate Hybrid

Abstract: A new mini-ultrasonic motor with a metal bar and piezoelectric plate hybrid as a stator has been studied. Four piezoelectric plates are bonded to four sides of the metal bar. The metal bar is made of brass and the piezoelectric plates are made of Pb(Zr-Ti)O 3 . The polarization direction is vertical to the piezoelectric plate. Compared with the cylindrical type of motor, the motor with a square cross-section makes polarization more sufficient and the signal wire easier to be welded. In this study, the modal an… Show more

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Cited by 21 publications
(11 citation statements)
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“…As an important part in a mechanical system, a lightweight and powerful actuator can decrease the total weight of system and increase the operability. Many researchers are focusing on developing lightweight USM and many micro USMs have been reported [2][3][4][5][6][7][8], whose vibrators were mainly made by metal or piezoelectric ceramics [9]. MEMS technology is also used to try on micro USM, however, it is applicable only for micro motor smaller than 1 mm, and available materials are limited.…”
Section: Introductionmentioning
confidence: 99%
“…As an important part in a mechanical system, a lightweight and powerful actuator can decrease the total weight of system and increase the operability. Many researchers are focusing on developing lightweight USM and many micro USMs have been reported [2][3][4][5][6][7][8], whose vibrators were mainly made by metal or piezoelectric ceramics [9]. MEMS technology is also used to try on micro USM, however, it is applicable only for micro motor smaller than 1 mm, and available materials are limited.…”
Section: Introductionmentioning
confidence: 99%
“…1,2) In fact, piezoelectric actuators have been partly put to practical use [3][4][5][6][7][8] and many studies of ultrasonic micromotors have been carried out. [9][10][11][12][13][14][15][16][17] However, these piezoelectric actuators are almost always fabricated using piezoelectric ceramics based on Pb(Zr,Ti)O 3 (PZT) with a high lead content, and the actuators using lead-free piezoelectric ceramics are strongly desired from the viewpoint of environmental protection.…”
Section: Introductionmentioning
confidence: 99%
“…2) In fact, piezoelectric actuators have been partly put to practical use, [3][4][5][6][7][8] and many studies on ultrasonic micromotors have been carried out. [9][10][11][12][13][14][15][16][17][18] Currently, these piezoelectric actuators are almost always made using piezoceramics based on Pb(Zr,Ti)O 3 (PZT) with a high lead content. Accordingly, actuators using lead-free piezoelectric ceramics are strongly desired from the viewpoint of environmental protection.…”
Section: Introductionmentioning
confidence: 99%