2022
DOI: 10.21883/sc.2022.10.54909.9951
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Study of active regions based on multiperiod GaAsN/InAs superlattice

Abstract: The results of a study of nitrogen-containing active regions based on superlattices grown on GaAs substrates are presented. Active regions based on alternating InAs and GaAsN layers were fabricated by molecular-beam epitaxy using a nitrogen plasma source. Based on the XRD analysis, the thicknesses and average composition of superlattice layers are estimated. The study of dark-field images obtained by transmission electron microscopy showed the presence of interdiffusion of InAs into GaAsN. The results of a stu… Show more

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Cited by 3 publications
(2 citation statements)
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References 36 publications
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“…In all cases SL consisting of GaAsN/In(Ga)As layers were considered. The mole fraction of nitrogen in the GaAsN layers was selected based on the analysis of the peak in the PL spectra [56,57]. For the mole fraction of indium in In(Ga)As, two compositions have been proposed: InAs (SL1, SL3) and In 0.8 Ga 0.2 As (SL2, SL4).…”
Section: Resultsmentioning
confidence: 99%
“…In all cases SL consisting of GaAsN/In(Ga)As layers were considered. The mole fraction of nitrogen in the GaAsN layers was selected based on the analysis of the peak in the PL spectra [56,57]. For the mole fraction of indium in In(Ga)As, two compositions have been proposed: InAs (SL1, SL3) and In 0.8 Ga 0.2 As (SL2, SL4).…”
Section: Resultsmentioning
confidence: 99%
“…Во всех случаях нами рассматривались СР, состоящие из слоев GaAsN/In(Ga)As. Мольная доля азота в слоях GaAsN была подобрана на основе анализа пика в спектрах ФЛ [56,57]. Для мольной доли индия в In(Ga)As были предложены два состава: InAs (СР1, СР3) и In 0.8 Ga 0.2 As (СР2, СР4).…”
Section: результаты и обсуждениеunclassified