Study of diamond films grown at low temperatures and pressures by ECR-assisted CVD

Gupta, Sushindra Kumar; Morell, Gerardo; Katiyar, Ram S.; Gilbert, Donald R.; Singh, Rohit

doi:10.1016/s0925-9635(98)00260-x

Cited by 6 publications

(2 citation statements)

References 12 publications

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“…The Bragg reflections characteristic of 〈111〉 and 〈400〉 diamond lattice planes were obtained for all the films (data not shown). Control experiments to grow diamond directly on Mo, Si, and quartz without nFeO or diamond seeding were unsuccessful for deposition times of 6 h, as expected, except for the formation of a MoC or a SiC surface layer according to XRD [ 13 ].…”

Section: Resultsmentioning

confidence: 99%

Iron Oxide Nanoparticles Employed as Seeds for the Induction of Microcrystalline Diamond Synthesis

et al. 2008

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Iron nanoparticles were employed to induce the synthesis of diamond on molybdenum, silicon, and quartz substrates. Diamond films were grown using conventional conditions for diamond synthesis by hot filament chemical vapor deposition, except that dispersed iron oxide nanoparticles replaced the seeding. X-ray diffraction, visible, and ultraviolet Raman Spectroscopy, energy-filtered transmission electron microscopy , electron energy-loss spectroscopy, and X-ray photoelectron spectroscopy (XPS) were employed to study the carbon bonding nature of the films and to analyze the carbon clustering around the seed nanoparticles leading to diamond synthesis. The results indicate that iron oxide nanoparticles lose the O atoms, becoming thus active C traps that induce the formation of a dense region of trigonally and tetrahedrally bonded carbon around them with the ensuing precipitation of diamond-type bonds that develop into microcrystalline diamond films under chemical vapor deposition conditions. This approach to diamond induction can be combined with dip pen nanolithography for the selective deposition of diamond and diamond patterning while avoiding surface damage associated to diamond-seeding methods.

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Section: Resultsmentioning

confidence: 99%

Iron Oxide Nanoparticles Employed as Seeds for the Induction of Microcrystalline Diamond Synthesis

et al. 2008

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“…Recently, much research has been carried out for synthesizing the high quality diamond thin-films using microwave plasma enhanced chemical vapor deposition (MWPCVD) [13][14][15][16][17], radio frequency (RF), DC plasma CVD [18,19], electron cyclotron resonance (ECR) plasma CVD [20][21][22], the hot filament CVD [23,24], the ion beam deposition method (IBD) [25], laser ablation, combustion flame, etc [26][27][28]. Generally, the low pressure CVD processes for synthesis of diamond films have been used with the activating gas phase carbon-containing precursor of CH 4 .…”

Section: Introductionmentioning

confidence: 99%

Effect of Oxygen for Diamond Film Synthesis with C-Hexane in Microwave Plasma Enhanced CVD Process

Han¹

2012

Journal of Electrical Engineering and Technology

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-The purpose of this paper is to decide the optimum synthesis conditions of polycrystalline diamond films according to the ratio of gas mixture. Diamond films were deposited with cyclo-hexane as a carbon precursor by the microwave plasma enhanced chemical vapor deposition process. The optimum oxygen ratio to cyclo-hexane was reached about 125 % under the fixed 0.3% c-hexane in hydrogen. Oxygen plays a role in etching the graphitic components of carbon sp2 bond effectively. By OES measurement, the best synthesis conditions found out about 12.5 % and 15.75 %, which is the emission intensity ratios of CH(B-X) and Hβ on Hα, respectively. Also, the electron temperature was similar about 5,000 to 5,200 K in this work.

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Low surface temperature synthesis and characterization of diamond thin films

Das

Jayaseelan

Ramamurti

et al. 2006

Diamond and Related Materials

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Study of diamond films grown at low temperatures and pressures by ECR-assisted CVD

Cited by 6 publications

References 12 publications

Iron Oxide Nanoparticles Employed as Seeds for the Induction of Microcrystalline Diamond Synthesis

Iron Oxide Nanoparticles Employed as Seeds for the Induction of Microcrystalline Diamond Synthesis

Effect of Oxygen for Diamond Film Synthesis with C-Hexane in Microwave Plasma Enhanced CVD Process

Low surface temperature synthesis and characterization of diamond thin films

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