Study of geometrical and operational parameters controlling the low frequency microjet atmospheric pressure plasma characteristics

Abstract

Controllability of small size atmospheric pressure plasma generated at low frequency in a pin to dielectric plane electrode configuration was studied. It was shown that the plasma characteristics could be controlled by geometrical and operational parameters of the experiment. Under most circumstances, continuous glow discharges were observed, but both the corona and/or the dielectric barrier discharge characteristics were observed depending on the position of the pin electrode. The plasma size and the rotational temperature were also varied by the parameters. The rotational temperature was between 300 and 490K, being low enough to treat thermally sensitive materials.

Comparative study of atmospheric pressure low and radio frequency microjet plasmas produced in a single electrode configuration

“…Furthermore, both plasmas were studied with a target, bearing in mind the applications. 5 The detailed results of the parametric and application feasibility studies will be presented elsewhere.…”

“…4 Especially, plasmas generated in a pin to dielectric barrier plane electrode structure or referred to as corona-DBD hybrid plasmas are frequently investigated for small size plasma generations using LF. 5 Meanwhile, radio frequency ͑rf͒ of 13.56 MHz is widely employed in planar or coaxial cylindrical capacitively coupled plasma ͑CCP͒ sources. Recently, the rf coaxial cylindrical CCP source is chosen to generate small size jet-type plasmas.…”

Power dissipation, gas temperatures and electron densities of cold atmospheric pressure helium and argon RF plasma jets

“…Voltage and current probes can be directly connected to the electrodes, allowing us to calculate the power dissipation of the plasma [10,11]. In the case of APPJs, however, the capacity of the probes is in the same order of magnitude as the capacity of the source.…”

Effects of the small diameter and the flow rate on the electric properties of the plasma needle

“…Several plasma jets with pulsed dc power have been developed [9][10][11][12] with voltages in the kilovolts range and pulse widths in the range from a nanosecond to a microsecond at kilohertz repetition rates. The plasma jets driven by ac power are usually generated by a dielectric barrier discharge with a few kilovolts sinusoidal wave at frequencies in the range of 5-50 kHz [13][14][15][16]. Recently, plasma jets have been also reported by an ac discharge [17].…”