Study of High Aspect Ratio NLD Plasma Etching and Postprocessing of Fused Silica and Borosilicate Glass

Ahamed, Mohammed Jalal; Senkal, Doruk; Trusov, Alexander A.; Shkel, Andrei M.

doi:10.1109/jmems.2015.2442596

Cited by 17 publications

(6 citation statements)

References 28 publications

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“…As illustrated in Fig. 1c, microgrooves are fabricated using the standard photolithography technique 61 . Briefly, SU-8 photoresist (SU-8 5, MicroChem, MA, USA) was spin-coated onto a cleaned glass substrate (150 μm in thickness; Matsunami Glass Ind., Japan) and exposed to UV radiation (100 mJ cm −2 ) through a photomask.…”

Section: Methodsmentioning

confidence: 99%

CYK4 relaxes the bias in the off-axis motion by MKLP1 kinesin-6

et al. 2021

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Centralspindlin, a complex of the MKLP1 kinesin-6 and CYK4 GAP subunits, plays key roles in metazoan cytokinesis. CYK4-binding to the long neck region of MKLP1 restricts the configuration of the two MKLP1 motor domains in the centralspindlin. However, it is unclear how the CYK4-binding modulates the interaction of MKLP1 with a microtubule. Here, we performed three-dimensional nanometry of a microbead coated with multiple MKLP1 molecules on a freely suspended microtubule. We found that beads driven by dimeric MKLP1 exhibited persistently left-handed helical trajectories around the microtubule axis, indicating torque generation. By contrast, centralspindlin, like monomeric MKLP1, showed similarly left-handed but less persistent helical movement with occasional rightward movements. Analysis of the fluctuating helical movement indicated that the MKLP1 stochastically makes off-axis motions biased towards the protofilament on the left. CYK4-binding to the neck domains in MKLP1 enables more flexible off-axis motion of centralspindlin, which would help to avoid obstacles along crowded spindle microtubules.

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Section: Methodsmentioning

confidence: 99%

CYK4 relaxes the bias in the off-axis motion by MKLP1 kinesin-6

et al. 2021

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“…Such replica molding has been widely used in PDMS based microfluidic fabrication. Various materials have been used to prepare the master in the PDMS replica molding based microfluidic fabrication, for example dry etched master materials such as silicon, [ 34,35 ] fused silica glass, [ 36 ] Pyrex, [ 36 ] and machined Teflon. Those molds can be used repeatedly as the PDMS does not interact with, or cause damage to, the master during either setting or removal.…”

Section: Resultsmentioning

confidence: 99%

Fabrication and Characterization of Autonomously Self‐Healable and Stretchable Soft Microfluidics

Wang

Pignanelli

et al. 2021

Advanced Sustainable Systems

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In this paper, a novel self‐healable and stretchable microfluidics system for next generation wearable lab‐on‐a‐chip is presented. An imine‐based precursor with various metal sources (Co(II), Fe(II), and Zn(II)) is used for the development of an intrinsically autonomous self‐healing microfluidic device. Microfluidics fabrication is performed on the self‐healing substrate layer using a mold transfer method. The mechanical properties of the resulting layer are evaluated using tensile strain pull testing. Microfluidic characteristics including fluid flow, wettability, leak, and fluorescence compatibility are investigated to understand its performance in classical microfluidic applications. The new microfluidic devices are also characterized using scanning‐electron microscopy to evaluate the mold transfer capability. The self‐healing microfluidics and the corresponding detailed fluidic characterization presented in this paper will open new opportunities for microfluidic lab on a chip development for various applications, especially in wearable electronics.

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“…The outer perimeter of the wineglass resonator and a central hole are defined using deep glass dry etching. Deep etching of glass is challenging requiring optimization of etch mask and dry etch parameters [ 91 ]. Deep trenches are etched using a thick, low-stress electroplated Cr/Ni hard etch mask.…”

Section: Microscale Hrg Fabrication Methods and Materialsmentioning

confidence: 99%

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Ranji

Damodaran

et al. 2022

Micromachines

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Macro-scale, hemispherical-shaped resonating gyroscopes are used in high-precision motion and navigation applications. In these gyroscopes, a 3D wine-glass, hemispherical-shaped resonating structure is used as the main sensing element. Motivated by the success of macroscale hemispherical shape gyroscopes, many microscale hemispherical-shaped resonators have been produced due to the rapid advancement in semiconductor-based microfabrication technologies. The dynamic performance of hemispherical resonators depends on the degree of symmetry, uniformity of thickness, and surface smoothness, which, in turn, depend on the type of materials and fabrication methods. The main aim of this review paper is to summarize the materials, characterization and fabrication methods reported in the literature for the fabrication of microscale hemispherical resonator gyroscopes (µHRGs). The theory behind the development of HRGs is described and advancements in the fabrication of microscale HRGs through various semiconductor-based fabrication techniques are outlined. The integration of electrodes with the hemispherical structure for electrical transduction using other materials and fabrication methods is also presented. A comparison of different materials and methods of fabrication from the point of view of device characteristics and dynamic performance is discussed. This review can help researchers in their future research and engineers to select the materials and methods for µHRG development.

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Study of High Aspect Ratio NLD Plasma Etching and Postprocessing of Fused Silica and Borosilicate Glass

Cited by 17 publications

References 28 publications

CYK4 relaxes the bias in the off-axis motion by MKLP1 kinesin-6

CYK4 relaxes the bias in the off-axis motion by MKLP1 kinesin-6

Fabrication and Characterization of Autonomously Self‐Healable and Stretchable Soft Microfluidics

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

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