For
years, many efforts in area selective atomic layer deposition
(AS-ALD) have focused on trying to achieve high-quality self-assembled
monolayers (SAMs), which have been shown by a number of studies to
be effective for blocking deposition. Herein, we show that in some
cases where a densely packed SAM is not formed, significant ALD inhibition
may still be realized. The formation of octadecylphosphonic acid (ODPA)
SAMs was evaluated on four metal substrates: Cu, Co, W, and Ru. The
molecular orientation, chain packing, and relative surface coverage
were evaluated using near-edge X-ray absorption fine structure (NEXAFS),
Fourier transform infrared (FTIR) spectroscopy, and electrochemical
impedance spectroscopy (EIS). ODPA SAMs formed on Co, Cu, and W showed
strong angular dependence of the NEXAFS signal whereas ODPA on Ru
did not, suggesting a disordered layer was formed on Ru. Additionally,
EIS and FTIR spectroscopy confirmed that Co and Cu form densely packed,
“crystal-like” SAMs whereas Ru and W form less dense
monolayers, a surprising result since W-ODPA was previously shown
to inhibit the ALD of ZnO and Al2O3 best among
all the substrates. This work suggests that multiple factors play
a role in SAM-based AS-ALD, not just the SAM quality. Therefore, metrological
averaging techniques (e.g., WCA and FTIR spectroscopy) commonly used
for evaluating SAMs to predict their suitability for ALD inhibition
should be supplemented by more atomically sensitive methods. Finally,
it highlights important considerations for describing the mechanism
of SAM-based selective ALD.