2023
DOI: 10.3390/coatings13020356
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Study of Ion-Assisted E-Beam Evaporation Coating Process on Chirped Mirrors

Abstract: A chirped mirror designed with 60 fs2 in group delay dispersion and reflectance large than 97.5% in the bandwidth between 700 and 900 nm by open-sourced thin film filter design software is presented. The chirped mirrors are then fabricated by an ion-assisted deposition coater. First, the optical constants of the thin films deposited by specific process parameters are calibrated by trial runs with single-layer samples measured by variable-angle spectroscopic ellipsometer; then factors are entered to compensate … Show more

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