Staggered heterostructure gate stack TFET is proposed. The analog, RF, and linearity performance of the device were studied in an ATLAS TCAD device simulator. The high K material HfO 2 was used in gate stacking. The impact of the gate stack width on the analog, RF, and linearity performance was investigated. Analog/RF performance of the staggered heterostructure gate stack TFET were analyzed in terms of figure of merits (FOMs) like transconductance (g m ), transconductance generation factor (TGF), voltage gain, electric field, cut off frequency (f T ), maximum frequency of oscillation (f max) , and gain band width (GBW). Gate stacking architecture in heterostructure staggered TFET improves the I on /I off ratio and reduces drain induced barrier lowering with respect to greater gate stack width (t oxh ), diminishing the short channel effects. Improvement in g m voltage gain, f T , f max , and GBW) were observed as the gate stack width thickened. A fair comparison of FOMs such as VIP 2 , VIP 3 , IIP 3 , IMD 3 , and 1 dB-compression point (P1 dB) were carried out by varying the gate stack width to investigate the linearity performance. The simulation results reveal that staggered heterostructure gate stack TFET can be a reasonable competitor for low-power applications and in the design of RF circuits covering a wide range in frequencies of RF spectrum.