ICMTS 1999. Proceedings of 1999 International Conference on Microelectronic Test Structures (Cat. No.99CH36307)
DOI: 10.1109/icmts.1999.766221
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Study of low frequency noise in the 0.18 μm silicon CMOS transistors

Abstract: The low fiequency noise in 0.18 pm N and P MOS devices is investigated, The devices used throughout this work have been fabricated according to a dual CMOS process with N' and P' polysilicon metal gate and retrograde well. Prior to the noise analysis, the static characteristics of the devices were measured with a semiconductor parameter analyzer Hp 4155. After which, a theoretical analysis of the drain current noise and the gate voltage noise characteristics is developed in the fiamework of the carrier number … Show more

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Cited by 14 publications
(17 citation statements)
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“…Additionally, recent measurements show higher values of flicker-noise factors in newer processes, likely due to increased processing damage at the Si-SiO 2 interface. Finally, the data given in [57,96] shows that gate-referred, flicker-noise voltage increases modestly for nMOS devices, but increases significantly for pMOS devices for operation at high V GS −V T in strong inversion. Such bias-related increases, however, can likely be managed by operation in moderate inversion or near the onset of strong inversion (IC = 10, V GS −V T ≈ 0.225 V) as required for low V GS −V T and V DSAT in low-voltage designs.…”
Section: Flicker Noisementioning
confidence: 94%
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“…Additionally, recent measurements show higher values of flicker-noise factors in newer processes, likely due to increased processing damage at the Si-SiO 2 interface. Finally, the data given in [57,96] shows that gate-referred, flicker-noise voltage increases modestly for nMOS devices, but increases significantly for pMOS devices for operation at high V GS −V T in strong inversion. Such bias-related increases, however, can likely be managed by operation in moderate inversion or near the onset of strong inversion (IC = 10, V GS −V T ≈ 0.225 V) as required for low V GS −V T and V DSAT in low-voltage designs.…”
Section: Flicker Noisementioning
confidence: 94%
“…Flicker-noise factors for operation near the onset of strong inversion (V GS − V T = 0.2 V) are higher at 10.6 × 10 −31 and 18.8×10 −31 C 2 /cm 2 for nMOS and pMOS devices in a 0.18-µm process having gate-oxide thickness of 4.5 nm [96]. Values for operation in strong inversion at V GS − V T = 0.5 V are even higher at 26 × 10 −31 C 2 /cm 2 for both nMOS and pMOS devices in a nitrided process having gate-oxide thickness of 4 nm [100].…”
Section: Flicker Noisementioning
confidence: 97%
“…From the observed discrepancy S vfb (f) and α S can be deduced [9]. The variations of S vfb (f) versus (W.L) and of S α versus L are reported in figure 4.…”
Section: Experimental Data and Modellingmentioning
confidence: 97%
“…13 for Si and SiGe channels. As can be seen, the LF noise can be well attributed to the carrier number fluctuation with correlated mobility fluctuations as given by following equation [21]:…”
Section: Low Frequency Noisementioning
confidence: 98%